JPH0216007U - - Google Patents
Info
- Publication number
- JPH0216007U JPH0216007U JP9467588U JP9467588U JPH0216007U JP H0216007 U JPH0216007 U JP H0216007U JP 9467588 U JP9467588 U JP 9467588U JP 9467588 U JP9467588 U JP 9467588U JP H0216007 U JPH0216007 U JP H0216007U
- Authority
- JP
- Japan
- Prior art keywords
- fluid pressure
- operating member
- pressure operated
- magnetic
- permanent magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 16
- 239000012530 fluid Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000004907 flux Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Actuator (AREA)
Description
第１図は本考案の一実施例である流体圧シリン
ダの位置検出装置の断面図、第２図はその磁気検
出素子の配置を示す図、第３図ａ，ｂはピストン
の位置による磁気検出素子の磁束の状態を示す概
略説明図、第４図は本考案に用いられる位置検出
回路の回路図、第５図は同じく本考案に用いるこ
とのできる他の位置検出回路の回路図、第６図は
磁気検出素子の他の配置例を示す図、第７図は本
考案における磁気検出素子により得られる特性を
示す図である。
１……シリンダチユーブ（外囲体）、２……ロ
ツドカバー、３……ヘツドカバー、４……ピスト
ン（作動部材）、５……第１の永久磁石、６ａ，
６ｂ……シリンダ室、７……ピストンロツド、８
，９……給排ポート、１０……位置検出手段、１
１……センサケース、１２……樹脂、１３……第
２の永久磁石、１４……磁気検出部材、１５……
リード線、１６……バツフアアンプ、１７，１７
ａ，１７ｂ……コンパレータ、１８，１８ａ，１
８ｂ……ボリユーム、１９……ＡＮＤ回路、Ａ，
Ａ′，Ｂ，Ｂ′……磁気検出素子。
Fig. 1 is a cross-sectional view of a position detection device for a fluid pressure cylinder which is an embodiment of the present invention, Fig. 2 is a diagram showing the arrangement of its magnetic detection element, and Fig. 3 a and b are magnetic detection based on the position of the piston. A schematic explanatory diagram showing the state of the magnetic flux of the element, FIG. 4 is a circuit diagram of a position detection circuit used in the present invention, FIG. 5 is a circuit diagram of another position detection circuit that can also be used in the present invention, and FIG. The figure shows another arrangement example of the magnetic detection element, and FIG. 7 is a diagram showing the characteristics obtained by the magnetic detection element according to the present invention. DESCRIPTION OF SYMBOLS 1... Cylinder tube (enclosure), 2... Rod cover, 3... Head cover, 4... Piston (operating member), 5... First permanent magnet, 6a,
6b...Cylinder chamber, 7...Piston rod, 8
, 9... Supply/discharge port, 10... Position detection means, 1
DESCRIPTION OF SYMBOLS 1... Sensor case, 12... Resin, 13... Second permanent magnet, 14... Magnetic detection member, 15...
Lead wire, 16... Buffer amplifier, 17, 17
a, 17b...Comparator, 18, 18a, 1
8b...Volume, 19...AND circuit, A,
A', B, B'... Magnetic detection elements.
Claims (1)
けられ、該外囲体内の作動部材の位置を検出する
装置であつて、前記作動部材の外側部分に第１の
永久磁石を設けると共に、前記外囲体の外側に取
付けられるセンサケース内に第２の永久磁石を設
け、この第２の永久磁石の前記作動部材側に、複
数個の磁気検出素子よりなる磁気検出部材を配設
したことを特徴とする流体圧作動機器の位置検出
装置。 ２ 前記磁気検出素子が、蒸着法または単結晶法
で作られた半導体形の磁気抵抗素子からなること
を特徴とする請求項１記載の流体圧作動機器の位
置検出装置。 ３ 前記作動部材が磁性材よりなることを特徴と
する請求項１記載の流体圧作動機器の位置検出装
置。[Claims for Utility Model Registration] 1. A device that is provided outside a non-magnetic envelope of a fluid pressure operated device and detects the position of an operating member within the envelope, the device being provided on the outside of the operating member. A first permanent magnet is provided, and a second permanent magnet is provided inside the sensor case attached to the outside of the outer enclosure, and a plurality of magnetic detection elements are arranged on the operating member side of the second permanent magnet. 1. A position detection device for a fluid pressure operated device, characterized in that a magnetic detection member is provided. 2. The position detection device for fluid pressure operated equipment according to claim 1, wherein the magnetic detection element is a semiconductor type magnetoresistive element made by a vapor deposition method or a single crystal method. 3. The position detection device for a fluid pressure operated device according to claim 1, wherein the operating member is made of a magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9467588U JPH0216007U (en) | 1988-07-18 | 1988-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9467588U JPH0216007U (en) | 1988-07-18 | 1988-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0216007U true JPH0216007U (en) | 1990-02-01 |
Family
ID=31319240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9467588U Pending JPH0216007U (en) | 1988-07-18 | 1988-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0216007U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002062104A (en) * | 2000-05-23 | 2002-02-28 | Soc Appl Gen Electr Mec <Sagem> | Axis location sensor for rod movable in axial direction and electromagnetic actuator for valve provided with the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6242005B2 (en) * | 1984-05-02 | 1987-09-05 | Kobe Steel Ltd |
-
1988
- 1988-07-18 JP JP9467588U patent/JPH0216007U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6242005B2 (en) * | 1984-05-02 | 1987-09-05 | Kobe Steel Ltd |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002062104A (en) * | 2000-05-23 | 2002-02-28 | Soc Appl Gen Electr Mec <Sagem> | Axis location sensor for rod movable in axial direction and electromagnetic actuator for valve provided with the same |
| JP4683765B2 (en) * | 2000-05-23 | 2011-05-18 | ジョンソン コントロールズ オートモーティブ エレクトロニクス | Axial position sensor for axially movable rod and electromagnetic actuator of valve provided with the same |
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