JPH02158909A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH02158909A JPH02158909A JP31230488A JP31230488A JPH02158909A JP H02158909 A JPH02158909 A JP H02158909A JP 31230488 A JP31230488 A JP 31230488A JP 31230488 A JP31230488 A JP 31230488A JP H02158909 A JPH02158909 A JP H02158909A
- Authority
- JP
- Japan
- Prior art keywords
- film
- hydrocarbon
- magnetic recording
- diamond
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 23
- 239000010408 film Substances 0.000 claims abstract description 48
- 239000010409 thin film Substances 0.000 claims abstract description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 22
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 21
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 21
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 19
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 17
- 239000000314 lubricant Substances 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 22
- 239000002994 raw material Substances 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 abstract description 12
- 230000007797 corrosion Effects 0.000 abstract description 12
- -1 polyethylene terephthalate Polymers 0.000 abstract description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 3
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 3
- 239000010410 layer Substances 0.000 abstract 2
- 239000011247 coating layer Substances 0.000 abstract 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 10
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- ZFFMLCVRJBZUDZ-UHFFFAOYSA-N 2,3-dimethylbutane Chemical compound CC(C)C(C)C ZFFMLCVRJBZUDZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- LVZWSLJZHVFIQJ-UHFFFAOYSA-N Cyclopropane Chemical compound C1CC1 LVZWSLJZHVFIQJ-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- NHTMVDHEPJAVLT-UHFFFAOYSA-N Isooctane Chemical compound CC(C)CC(C)(C)C NHTMVDHEPJAVLT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- XLNZHTHIPQGEMX-UHFFFAOYSA-N ethane propane Chemical compound CCC.CCC.CC.CC XLNZHTHIPQGEMX-UHFFFAOYSA-N 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- GECHUMIMRBOMGK-UHFFFAOYSA-N sulfapyridine Chemical compound C1=CC(N)=CC=C1S(=O)(=O)NC1=CC=CC=N1 GECHUMIMRBOMGK-UHFFFAOYSA-N 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は強磁性金属薄膜を磁気記録層とする磁気記録媒
体に関し、特に、炭化水素によるプラズマ重合膜と炭素
数４以上の多分枝炭化水素を原料としたダイヤモンド状
炭素膜との組み合わせにより高出力、高耐久性、高耐蝕
性を実現させた磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic recording medium having a ferromagnetic metal thin film as a magnetic recording layer, and in particular, it relates to a magnetic recording medium using a ferromagnetic metal thin film as a magnetic recording layer, and in particular, a plasma-polymerized film made of a hydrocarbon and a polybranched hydrocarbon having 4 or more carbon atoms as raw materials. This invention relates to a magnetic recording medium that achieves high output, high durability, and high corrosion resistance by combining with a diamond-like carbon film.
従来の技術
従来、強磁性金属薄膜を磁気記録層とする磁気記録媒体
においては、様々な方法により耐蝕性。BACKGROUND OF THE INVENTION Conventionally, in magnetic recording media whose magnetic recording layer is a ferromagnetic metal thin film, corrosion resistance has been improved using various methods.
メチル耐久性１走行耐久性の向上が続けられてきた。た
とえば、第１に、強磁性金属薄膜上にカルボン酸系、リ
ン系の滑剤層を設ける、第２に、同様に非磁性金属の保
護膜を設ける、第３に、同様に８１０２膜を設ける、等
である。しかし、これらの保護膜ではもう一歩ヌチル耐
久性と耐蝕性が改善されないのが現状である。そこで最
近では、ダイヤモンド状炭素膜を薄膜型磁気記録媒体の
保護膜として用いることも検討されている。Methyl Durability 1 The running durability has continued to improve. For example, firstly, a carboxylic acid-based or phosphorus-based lubricant layer is provided on a ferromagnetic metal thin film, secondly, a non-magnetic metal protective film is similarly provided, and thirdly, an 8102 film is similarly provided. etc. However, the current situation is that these protective films do not further improve the durability and corrosion resistance. Therefore, recently, consideration has been given to using a diamond-like carbon film as a protective film for thin-film magnetic recording media.
発明が解決しようとする課題
上記ダイヤモンド状炭素膜を用いる技術はヌチル耐久性
を著しく向上させる効果はあるが、その厚みによるヌベ
ーシングロヌにより薄膜型磁気記録媒体の特徴である短
波長記録の高出力に大きなマイナヌとなり、実用性に欠
ける。具体的には、ダイヤモンド状炭素膜によるヌチル
耐久性の向上には、この膜厚が２００人〜３００人必要
であり、このため８ｇｇＶＴＲ規格のｃｓ ＭＨｚのＹ
−出力で約３．０〜４．ｏｄＢ出力が低下してしまって
いた。Problems to be Solved by the Invention Although the technology using the diamond-like carbon film described above has the effect of significantly improving Nutill durability, the Nubasing Ronin due to its thickness has a large effect on the high output of short wavelength recording, which is a characteristic of thin-film magnetic recording media. It becomes a minor problem and lacks practicality. Specifically, in order to improve the durability of the diamond-like carbon film, it is necessary to increase the film thickness by 200 to 300 people.
- Approximately 3.0 to 4. The odB output had decreased.
本発明はヌベーシングロヌを減少させるとともに、ヌチ
ル耐久性、耐蝕性の優れた高出力の金属薄膜型磁気記録
媒体を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a high-output metal thin film magnetic recording medium that reduces Nubasing Ronu and has excellent Nutill durability and corrosion resistance.
課題を解決するだめの手段
上記目的を達成するために本発明は、非出性基板上に強
磁性金属薄膜を形成し、この強磁性金属薄膜上に炭化水
素のプラズマ重合膜を形成し、さらにこのプラズマ重合
膜上に炭素数４以上の多分枝炭化水素を原料としたダイ
ヤモンド状炭素膜を形成し、トップコート層として滑剤
層を有することを特徴とする。Means for Solving the Problems In order to achieve the above objects, the present invention forms a ferromagnetic metal thin film on a non-emissive substrate, forms a hydrocarbon plasma polymerized film on the ferromagnetic metal thin film, and further A diamond-like carbon film made from a polybranched hydrocarbon having 4 or more carbon atoms is formed on this plasma polymerized film, and is characterized by having a lubricant layer as a top coat layer.
作用
本発明によれば強磁性金属薄膜の上に炭化水素のプラズ
マ重合膜を設け、この上に炭素数４以上の多分枝炭化水
素のダイヤモンド状炭素膜２を形成し、さらにこの上に
滑剤層を形成ビたので、ｍｌ記強磁性金属薄膜層の表面
酸化層の変質を防ぎこの残った表面酸化膜とダイヤモン
ド状炭素膜層とが二重の保護膜となって、ダイヤモンド
状炭素膜層を薄くすることができるとともに、金属薄膜
型磁気記録媒体のヌチル耐久性、耐蝕性は著しく向上す
る。−！た、ヌチル耐久性が向上したのにつれて走行耐
久性の向上もはかれる。一方、出力低下は１．○ｄＢ〜
１．６ ｄＢ程度に抑えることができる。According to the present invention, a plasma-polymerized hydrocarbon film is provided on a ferromagnetic metal thin film, a diamond-like carbon film 2 of a multi-branched hydrocarbon having 4 or more carbon atoms is formed thereon, and a lubricant layer is further formed on this. The remaining surface oxide film and the diamond-like carbon film layer act as a double protective film to prevent the surface oxide layer of the ferromagnetic metal thin film layer from deteriorating. It can be made thinner, and the durability and corrosion resistance of the metal thin film magnetic recording medium are significantly improved. -! Additionally, as the nut durability has improved, the running durability has also improved. On the other hand, the output decrease is 1. ○dB～
It can be suppressed to about 1.6 dB.
実旌例
以下、本発明の磁気記録媒体の一実施例を添付図面に基
づいて説明する。Practical Example Hereinafter, an example of the magnetic recording medium of the present invention will be described based on the accompanying drawings.
ポリエチレンテレフタレートからなる基板５上面に強磁
性金属薄膜４を形成し、この強磁性金属薄膜４上に、炭
化水素のプラズマ重合膜３を形成し、さらに、炭素数４
以上の多分枝炭化水素のダイヤモンド状炭素膜２を形成
した後、滑剤層１を重ねて形成する一方、前記基板６の
下面にはバフクコ−１−層６を形成して構成したもので
ある。A ferromagnetic metal thin film 4 is formed on the upper surface of a substrate 5 made of polyethylene terephthalate, and a hydrocarbon plasma polymerized film 3 is formed on this ferromagnetic metal thin film 4.
After forming the diamond-like carbon film 2 of multi-branched hydrocarbon as described above, a lubricant layer 1 is overlaid thereon, and a bafukuco-1 layer 6 is formed on the lower surface of the substrate 6.
このように構成した磁気記録媒体と、他の材料を用いた
同一構成の磁気記録媒体とを、ヌチル耐久性、耐蝕性に
ついて比較試験を行った結果、炭化水素より作ったプラ
ズマ重合膜３と炭素数４以上の多分枝炭化水素より成膜
したダイヤモンド状炭素膜２を用いた磁気記録媒体のヌ
チル耐久性と耐蝕性が非常に高かった。このプラズマ重
合膜３の厚みが５Å以下では強磁性金属薄膜４の表面酸
化層の変質を防ぎきれず、ヌチル耐久性を飛躍的に高め
るためには、出力をやはり−３，０ｄＢ程度低下させる
ことになる。一方、厚みが６０八以上のプラズマ重合膜
３の場合には、ダイヤモンド状炭素膜２の厚みによらず
ヌチル耐久性が劣化しはじめる。このように、炭化水素
によるプラズマ重合膜３の最適厚みは約６人〜６ｏ入で
ある。また、炭化水素のプラズマ重合膜３を有する磁気
記録媒体のダイヤモンド状炭素膜２の厚みは６０Å以上
あれはヌチル耐久性、耐蝕性的には十分であるが、７ペ
ーシングロ７との関係から６０人〜１００人の厚みが最
適である。Comparative tests were conducted on the durability and corrosion resistance of magnetic recording media constructed in this way and magnetic recording media of the same construction made using other materials. The magnetic recording medium using the diamond-like carbon film 2 formed from multi-branched hydrocarbons of number 4 or more had very high null durability and corrosion resistance. If the thickness of the plasma polymerized film 3 is less than 5 Å, it will not be possible to prevent the surface oxidation layer of the ferromagnetic metal thin film 4 from deteriorating, and in order to dramatically increase the NuTil durability, the output must be reduced by about -3.0 dB. become. On the other hand, in the case of a plasma polymerized film 3 having a thickness of 60 mm or more, the Nutyl durability begins to deteriorate regardless of the thickness of the diamond-like carbon film 2. As described above, the optimum thickness of the plasma polymerized membrane 3 made of hydrocarbon is approximately 6 to 6 mm. Furthermore, if the thickness of the diamond-like carbon film 2 of the magnetic recording medium having the plasma polymerized film 3 of hydrocarbon is 60 Å or more, it is sufficient for durability and corrosion resistance. The optimum thickness is between 1 and 100 people.
次に、本発明の磁気記録媒体およびこれと比較するため
の磁気記録媒体を、８Ｈビテ゛オ用金属薄膜型テープと
して製造する方法および比較試験結果について詳述する
。Next, a method for manufacturing the magnetic recording medium of the present invention and a magnetic recording medium for comparison thereto as a metal thin film tape for 8H video and the results of comparative tests will be described in detail.
異常に大きな突起のない、表面粗さのコントロールされ
た５００ＨＭ幅のポリエチレンテレフタレート、たとえ
ば、表面最大粗さ２００人〜３００人、中心線平均粗さ
２６人〜６０人、山状突起の′１ぞ度が１−当り１０４
〜１０８個の基板６上に、真空蒸着法により酸素全導入
しながらＧｏ（８０）〜Ｎ１（２０）の強磁性金属薄膜
４を２０００人形成した後、この強磁性金属薄膜４上へ
真空度０、Ｉ ＴＯｒｒ −３０ＫＨｚの周波数で出力
６００Ｗの条件で、炭化水素をはじめとする各種材料の
プラズマ重合膜３を６人〜１００人形成し、サンプルと
した。流量は材料によって異なり２０ＳＣ；ＣＭ〜１０
０３ＣＣＭである。これは連続巻取式の真空装置で処理
する。次に、これらのサンプルのプラズマ重合膜３上へ
、炭素数４以上の多分枝炭化水素だけまたはこれとＡｒ
、ムｒとメタンとの混合ガスを０．３ Ｔｏｒｒの真空
度で、ＤＣ電圧を７００Ｖ〜２０００’／印加して、（
電極をプラス、強磁性金属薄膜４側をマイナスとする）
プラズマＣｖ′Ｄ法によりダイヤモンド状炭素膜２を６
０人〜１００への厚さで形成する。流量はトータルガス
として５０８ＧＣＭ 〜２００ＳＣＣＭである。これも
連続巻取式の真空装置で処理する。さらに溶媒と混合し
塗工乾燥する方法或いは真空蒸着法などの周知のコーテ
ィング法により、このダイヤモンド状炭素膜２上に含フ
、、素脂肪酸を２０人〜６０入塗布して滑剤層１を形成
し、スリッターによりｓＩｔＭ幅に裁断する。このよう
にして作成され九８絹ビデオ用金属薄膜型テープをコダ
ノク社の８＃ＶＴＲで評価した。500HM wide polyethylene terephthalate with controlled surface roughness, without abnormally large protrusions, for example, maximum surface roughness of 200 to 300, average centerline roughness of 26 to 60, peak-like protrusions of '1'. degree is 1-104 per
After forming 2000 ferromagnetic metal thin films 4 of Go(80) to N1(20) on ~108 substrates 6 by vacuum evaporation method while fully introducing oxygen, the ferromagnetic metal thin films 4 were coated with a vacuum degree. Plasma polymerized films 3 of various materials including hydrocarbons were formed by 6 to 100 people under conditions of a frequency of 0.0, I TOrr -30 KHz and an output of 600 W, and used as samples. Flow rate varies depending on material: 20SC; CM~10
03CCM. This process is performed using a continuous winding type vacuum device. Next, polybranched hydrocarbons having 4 or more carbon atoms alone or together with Ar are applied onto the plasma polymerized films 3 of these samples.
, by applying a DC voltage of 700V to 2000' to a mixed gas of methane and methane at a vacuum of 0.3 Torr.
The electrode is positive, and the ferromagnetic metal thin film 4 side is negative)
A diamond-like carbon film 2 is formed by the plasma Cv'D method.
Formed in thickness from 0 to 100. The flow rate is 508 GCM to 200 SCCM as a total gas. This is also processed using a continuous winding type vacuum device. Further, by a well-known coating method such as mixing with a solvent, coating and drying, or a vacuum deposition method, 20 to 60 fluorine-containing fatty acids are coated on the diamond-like carbon film 2 to form a lubricant layer 1. Then, cut it into sItM width using a slitter. The 98 silk video metal thin film tape thus prepared was evaluated using an 8# VTR manufactured by Kodanok.
なお、プラズマ重合膜用の炭化水素とはメタン。The hydrocarbon for plasma polymerized membranes is methane.
エタンプロパン等の飽和炭化水素、シクロプロパン等の
環状炭化水素、ベンゼン等の芳香族炭化水素を含む。一
方ダイヤモンド状炭素膜用の炭素数４以上の多分枝炭化
水素とは、２個以上の分枝メチル基を含む飽和あるいは
不飽和の炭化水素のことであり−たとえば２，３−ジメ
チルブタン、２゜３ジメチル−１，３−ブタジェン、３
．３−ジメチル−１−ブテン、２１２．３−トリメチル
ブタン、２．４−ジメチルペンタン、２，２．４−トリ
メチル−２−ペンテン、２，２．４−トリメチルペンタ
ン等を上げることができる。Contains saturated hydrocarbons such as ethanepropane, cyclic hydrocarbons such as cyclopropane, and aromatic hydrocarbons such as benzene. On the other hand, polybranched hydrocarbons having 4 or more carbon atoms for use in diamond-like carbon membranes are saturated or unsaturated hydrocarbons containing two or more branched methyl groups, such as 2,3-dimethylbutane, 2゜3dimethyl-1,3-butadiene, 3
．． Examples include 3-dimethyl-1-butene, 212.3-trimethylbutane, 2.4-dimethylpentane, 2,2.4-trimethyl-2-pentene, and 2,2.4-trimethylpentane.
表の結果より明らかなごとく、サンプルｆ１〜６のよう
に炭化水素のプラズマ２重合膜３を６人〜６０人設け、
さらに多分枝灰化水素だけ、あるいはこれとアルゴンと
の混合ガスまたはこれとアルゴンとメタンとの混合ガス
を原料としたダイヤモンド状炭素膜を６０人〜１２０人
設ければスペーシングロスによる出力低下を低く抑えな
から一スチル耐久性と耐蝕性を飛躍的に伸ばすことがで
きる。また、これらのサンプルはメタンを用いたダイヤ
モンド状炭素膜よりも成膜レートが２〜３倍高くかつ膜
質が向上しており、メチル耐久性も高い。As is clear from the results in the table, as in samples f1 to f6, the hydrocarbon plasma double-polymerized film 3 was provided by 6 to 60 people,
Furthermore, if 60 to 120 diamond-like carbon films are made of hydrogen branch ash, or a mixture of this and argon, or a mixture of this and argon and methane, the output will decrease due to spacing loss. Since it is kept low, single-still durability and corrosion resistance can be dramatically increased. Furthermore, these samples have a film formation rate 2 to 3 times higher than a diamond-like carbon film using methane, have improved film quality, and have high methyl durability.
発明の効果
本発明によれば、出力低下をほとんど伴なわずスチル耐
久性と耐蝕性を飛躍的に向上させることが可能となると
いうすぐれた効果を奏するのでたとえば薄膜型磁気テー
プ、磁気ディスク等に応用できる。Effects of the Invention According to the present invention, it is possible to dramatically improve still durability and corrosion resistance with almost no reduction in output. Can be applied.
図面は本発明による磁気記録媒体の概略的な断面図であ
る。
１・・・・・・滑剤層、２・・・・・・ダイヤモンド状
炭素膜。
３・・・・・・プラズマ重合膜、４・・・・・・強磁性
金属薄膜、６・・・・・・基板、ｅ・・・・・・バック
コート層。The drawing is a schematic cross-sectional view of a magnetic recording medium according to the present invention. 1...Lubricant layer, 2...Diamond-like carbon film. 3... Plasma polymerized film, 4... Ferromagnetic metal thin film, 6... Substrate, e... Back coat layer.
Claims (1)
属薄膜上に炭化水素のプラズマ重合膜を形成し、さらに
このプラズマ重合膜上に炭素数４以上の多分枝炭化水素
を原料としたダイヤモンド状炭素膜を形成し、トップコ
ート層として滑剤層を有することを特徴とする磁気記録
媒体。A ferromagnetic metal thin film is formed on a non-magnetic substrate, a hydrocarbon plasma polymerized film is formed on this ferromagnetic metal thin film, and a polybranched hydrocarbon having carbon number of 4 or more is used as a raw material on this plasma polymerized film. A magnetic recording medium characterized by forming a diamond-like carbon film and having a lubricant layer as a top coat layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63312304A JP2523839B2 (en) | 1988-12-09 | 1988-12-09 | Method of manufacturing magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63312304A JP2523839B2 (en) | 1988-12-09 | 1988-12-09 | Method of manufacturing magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02158909A true JPH02158909A (en) | 1990-06-19 |
| JP2523839B2 JP2523839B2 (en) | 1996-08-14 |
Family
ID=18027640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63312304A Expired - Fee Related JP2523839B2 (en) | 1988-12-09 | 1988-12-09 | Method of manufacturing magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2523839B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5591481A (en) * | 1991-07-15 | 1997-01-07 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a magnetic recording medium including forming a graft polymer lubricant layer by irradiating monomers with radicals or atomic gas |
| US5776602A (en) * | 1994-10-25 | 1998-07-07 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium having a carbon protective film containing nitrogen and oxygen and overcoated with a lubricant |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61105720A (en) * | 1984-10-26 | 1986-05-23 | Denki Kagaku Kogyo Kk | Magnetic storage medium |
| JPH01245417A (en) * | 1988-03-28 | 1989-09-29 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
-
1988
- 1988-12-09 JP JP63312304A patent/JP2523839B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61105720A (en) * | 1984-10-26 | 1986-05-23 | Denki Kagaku Kogyo Kk | Magnetic storage medium |
| JPH01245417A (en) * | 1988-03-28 | 1989-09-29 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5591481A (en) * | 1991-07-15 | 1997-01-07 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a magnetic recording medium including forming a graft polymer lubricant layer by irradiating monomers with radicals or atomic gas |
| US5776602A (en) * | 1994-10-25 | 1998-07-07 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium having a carbon protective film containing nitrogen and oxygen and overcoated with a lubricant |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2523839B2 (en) | 1996-08-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |