JPH0215726U - - Google Patents
Info
- Publication number
- JPH0215726U JPH0215726U JP9296288U JP9296288U JPH0215726U JP H0215726 U JPH0215726 U JP H0215726U JP 9296288 U JP9296288 U JP 9296288U JP 9296288 U JP9296288 U JP 9296288U JP H0215726 U JPH0215726 U JP H0215726U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- valve
- quartz
- tank body
- wedge member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims 1
- 229910021641 deionized water Inorganic materials 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Joints With Pressure Members (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9296288U JPH0215726U (enExample) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9296288U JPH0215726U (enExample) | 1988-07-15 | 1988-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215726U true JPH0215726U (enExample) | 1990-01-31 |
Family
ID=31317410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9296288U Pending JPH0215726U (enExample) | 1988-07-15 | 1988-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215726U (enExample) |
-
1988
- 1988-07-15 JP JP9296288U patent/JPH0215726U/ja active Pending