JPH0215725U - - Google Patents
Info
- Publication number
- JPH0215725U JPH0215725U JP9338588U JP9338588U JPH0215725U JP H0215725 U JPH0215725 U JP H0215725U JP 9338588 U JP9338588 U JP 9338588U JP 9338588 U JP9338588 U JP 9338588U JP H0215725 U JPH0215725 U JP H0215725U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- gas introduction
- main body
- nozzle
- introduction passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9338588U JPH0726840Y2 (ja) | 1988-07-13 | 1988-07-13 | 集束イオンビーム装置のガス導入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9338588U JPH0726840Y2 (ja) | 1988-07-13 | 1988-07-13 | 集束イオンビーム装置のガス導入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215725U true JPH0215725U (cs) | 1990-01-31 |
| JPH0726840Y2 JPH0726840Y2 (ja) | 1995-06-14 |
Family
ID=31317841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9338588U Expired - Lifetime JPH0726840Y2 (ja) | 1988-07-13 | 1988-07-13 | 集束イオンビーム装置のガス導入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726840Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019208049A (ja) * | 2013-03-12 | 2019-12-05 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 方位角方向及び半径方向分布制御を備えたマルチゾーンガス注入アセンブリ |
-
1988
- 1988-07-13 JP JP9338588U patent/JPH0726840Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019208049A (ja) * | 2013-03-12 | 2019-12-05 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 方位角方向及び半径方向分布制御を備えたマルチゾーンガス注入アセンブリ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726840Y2 (ja) | 1995-06-14 |