JPH0215722U - - Google Patents
Info
- Publication number
- JPH0215722U JPH0215722U JP9369488U JP9369488U JPH0215722U JP H0215722 U JPH0215722 U JP H0215722U JP 9369488 U JP9369488 U JP 9369488U JP 9369488 U JP9369488 U JP 9369488U JP H0215722 U JPH0215722 U JP H0215722U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- cleaning liquid
- rotary table
- back side
- developing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9369488U JPH0215722U (cs) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9369488U JPH0215722U (cs) | 1988-07-15 | 1988-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215722U true JPH0215722U (cs) | 1990-01-31 |
Family
ID=31318164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9369488U Pending JPH0215722U (cs) | 1988-07-15 | 1988-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215722U (cs) |
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1988
- 1988-07-15 JP JP9369488U patent/JPH0215722U/ja active Pending