JPH021562U - - Google Patents

Info

Publication number
JPH021562U
JPH021562U JP7971788U JP7971788U JPH021562U JP H021562 U JPH021562 U JP H021562U JP 7971788 U JP7971788 U JP 7971788U JP 7971788 U JP7971788 U JP 7971788U JP H021562 U JPH021562 U JP H021562U
Authority
JP
Japan
Prior art keywords
fluorine
collection box
inert solvent
based inert
cooling pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7971788U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7971788U priority Critical patent/JPH021562U/ja
Publication of JPH021562U publication Critical patent/JPH021562U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例の一部切り欠き側面
図である。 1……排気管、2……じやま板、3……冷却管
、4……液溜り、5……排出管、6……回収ボツ
クス、7……蒸気。
FIG. 1 is a partially cutaway side view of an embodiment of the present invention. 1...exhaust pipe, 2...wall board, 3...cooling pipe, 4...liquid pool, 5...exhaust pipe, 6...collection box, 7...steam.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 排気管に接続する回収ボツクスと、該回収ボツ
クス内に設けられフツ素系不活性溶剤の蒸気を減
速し冷却するじやま板及び冷却管と、前記回収ボ
ツクスの底面部に設けられ液化したフツ素系不活
性溶剤を排出する排出管とを含むことを特徴とす
るフツ素系不活性溶剤回収装置。
A collection box connected to the exhaust pipe, a cooling pipe and a cooling pipe provided in the collection box to slow down and cool the vapor of the fluorine-based inert solvent, and a cooling pipe provided on the bottom of the collection box to collect the liquefied fluorine. A fluorine-based inert solvent recovery device comprising: a discharge pipe for discharging the fluorine-based inert solvent.
JP7971788U 1988-06-15 1988-06-15 Pending JPH021562U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7971788U JPH021562U (en) 1988-06-15 1988-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7971788U JPH021562U (en) 1988-06-15 1988-06-15

Publications (1)

Publication Number Publication Date
JPH021562U true JPH021562U (en) 1990-01-08

Family

ID=31304574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7971788U Pending JPH021562U (en) 1988-06-15 1988-06-15

Country Status (1)

Country Link
JP (1) JPH021562U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS633543U (en) * 1986-06-24 1988-01-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS633543U (en) * 1986-06-24 1988-01-11
JPH0537076Y2 (en) * 1986-06-24 1993-09-20

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