JPH02150241U - - Google Patents
Info
- Publication number
- JPH02150241U JPH02150241U JP6026989U JP6026989U JPH02150241U JP H02150241 U JPH02150241 U JP H02150241U JP 6026989 U JP6026989 U JP 6026989U JP 6026989 U JP6026989 U JP 6026989U JP H02150241 U JPH02150241 U JP H02150241U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- marking
- holder
- attached
- downward load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図は従来例を示す構成図である。
１……ＸＹＺステージ、２……バランサー、３
……下限調整用ネジ、４……ホルダー、５……マ
ーキング針、６……圧搾空気吹出し口、７……半
導体素子、８……ステージ、８ａ……試料吸着用
孔、９……流量計。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a configuration diagram showing a conventional example. 1...XYZ stage, 2...Balancer, 3
... Lower limit adjustment screw, 4 ... Holder, 5 ... Marking needle, 6 ... Compressed air outlet, 7 ... Semiconductor element, 8 ... Stage, 8a ... Sample adsorption hole, 9 ... Flowmeter .
Claims (1)
半導体素子マーキング装置において、俯仰可能に
枢支されたホルダーと、前記ホルダーの一端に半
導体素子に対して垂直に配置して取付けられたマ
ーキング針と、前記ホルダーに圧搾空気を作用さ
せてマーキング針に半導体素子に対する圧下荷重
を付与する機構と、前記ホルダーの他端に取付け
られ、前記圧下荷重の微調整を行うバランサーと
を有することを特徴とする半導体素子マーキング
装置。 A semiconductor device marking device that marks a semiconductor device with a marking needle includes a holder that is pivotably supported so as to be able to move up and down, a marking needle that is attached to one end of the holder so as to be arranged perpendicularly to the semiconductor device, and A semiconductor device marking device characterized by having a mechanism that applies compressed air to a marking needle to apply a downward load on the semiconductor device, and a balancer that is attached to the other end of the holder and finely adjusts the downward load. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6026989U JPH02150241U (en) | 1989-05-24 | 1989-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6026989U JPH02150241U (en) | 1989-05-24 | 1989-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02150241U true JPH02150241U (en) | 1990-12-25 |
Family
ID=31587489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6026989U Pending JPH02150241U (en) | 1989-05-24 | 1989-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02150241U (en) |
-
1989
- 1989-05-24 JP JP6026989U patent/JPH02150241U/ja active Pending
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