JPH02150209U - - Google Patents

Info

Publication number
JPH02150209U
JPH02150209U JP5933889U JP5933889U JPH02150209U JP H02150209 U JPH02150209 U JP H02150209U JP 5933889 U JP5933889 U JP 5933889U JP 5933889 U JP5933889 U JP 5933889U JP H02150209 U JPH02150209 U JP H02150209U
Authority
JP
Japan
Prior art keywords
ceramic substrate
substrate
dividing
grooves
presser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5933889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541554Y2 (US07223432-20070529-C00017.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5933889U priority Critical patent/JPH0541554Y2/ja
Publication of JPH02150209U publication Critical patent/JPH02150209U/ja
Application granted granted Critical
Publication of JPH0541554Y2 publication Critical patent/JPH0541554Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP5933889U 1989-05-23 1989-05-23 Expired - Lifetime JPH0541554Y2 (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5933889U JPH0541554Y2 (US07223432-20070529-C00017.png) 1989-05-23 1989-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5933889U JPH0541554Y2 (US07223432-20070529-C00017.png) 1989-05-23 1989-05-23

Publications (2)

Publication Number Publication Date
JPH02150209U true JPH02150209U (US07223432-20070529-C00017.png) 1990-12-25
JPH0541554Y2 JPH0541554Y2 (US07223432-20070529-C00017.png) 1993-10-20

Family

ID=31585748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5933889U Expired - Lifetime JPH0541554Y2 (US07223432-20070529-C00017.png) 1989-05-23 1989-05-23

Country Status (1)

Country Link
JP (1) JPH0541554Y2 (US07223432-20070529-C00017.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152702A (ja) * 2010-01-27 2011-08-11 Kyocera Corp 基板分割装置および基板分割方法
JP2012124300A (ja) * 2010-12-08 2012-06-28 Tokyo Seimitsu Co Ltd ウェーハ破断方法およびウェーハ破断装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152702A (ja) * 2010-01-27 2011-08-11 Kyocera Corp 基板分割装置および基板分割方法
JP2012124300A (ja) * 2010-12-08 2012-06-28 Tokyo Seimitsu Co Ltd ウェーハ破断方法およびウェーハ破断装置

Also Published As

Publication number Publication date
JPH0541554Y2 (US07223432-20070529-C00017.png) 1993-10-20

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