JPH02149765U - - Google Patents

Info

Publication number
JPH02149765U
JPH02149765U JP5764689U JP5764689U JPH02149765U JP H02149765 U JPH02149765 U JP H02149765U JP 5764689 U JP5764689 U JP 5764689U JP 5764689 U JP5764689 U JP 5764689U JP H02149765 U JPH02149765 U JP H02149765U
Authority
JP
Japan
Prior art keywords
plating
anode
semiconductor wafer
cup
plating cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5764689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5764689U priority Critical patent/JPH02149765U/ja
Publication of JPH02149765U publication Critical patent/JPH02149765U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
JP5764689U 1989-05-18 1989-05-18 Pending JPH02149765U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5764689U JPH02149765U (US20100056889A1-20100304-C00004.png) 1989-05-18 1989-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5764689U JPH02149765U (US20100056889A1-20100304-C00004.png) 1989-05-18 1989-05-18

Publications (1)

Publication Number Publication Date
JPH02149765U true JPH02149765U (US20100056889A1-20100304-C00004.png) 1990-12-21

Family

ID=31582544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5764689U Pending JPH02149765U (US20100056889A1-20100304-C00004.png) 1989-05-18 1989-05-18

Country Status (1)

Country Link
JP (1) JPH02149765U (US20100056889A1-20100304-C00004.png)

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