JPH02149759U - - Google Patents
Info
- Publication number
- JPH02149759U JPH02149759U JP5833989U JP5833989U JPH02149759U JP H02149759 U JPH02149759 U JP H02149759U JP 5833989 U JP5833989 U JP 5833989U JP 5833989 U JP5833989 U JP 5833989U JP H02149759 U JPH02149759 U JP H02149759U
- Authority
- JP
- Japan
- Prior art keywords
- processing object
- forming apparatus
- opening
- film forming
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5833989U JPH02149759U ( ) | 1989-05-19 | 1989-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5833989U JPH02149759U ( ) | 1989-05-19 | 1989-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02149759U true JPH02149759U ( ) | 1990-12-21 |
Family
ID=31583859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5833989U Pending JPH02149759U ( ) | 1989-05-19 | 1989-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02149759U ( ) |
-
1989
- 1989-05-19 JP JP5833989U patent/JPH02149759U/ja active Pending