JPH02149406U - - Google Patents
Info
- Publication number
- JPH02149406U JPH02149406U JP5792589U JP5792589U JPH02149406U JP H02149406 U JPH02149406 U JP H02149406U JP 5792589 U JP5792589 U JP 5792589U JP 5792589 U JP5792589 U JP 5792589U JP H02149406 U JPH02149406 U JP H02149406U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- lid
- drive source
- potentiometer
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Sliding Valves (AREA)
- Control Of Fluid Pressure (AREA)
Description
第１図は本考案バルブの一実施例を示す斜視図
、第２図ａ〜ｃはそれぞれ本考案バルブの全閉状
態、半開状態、及び全開状態を示す斜視図、第３
図ａ〜ｃは同じく本考案バルブが全閉（開口度０
％）、半開（開口度５０％）及び全開（開口度１
００％）したことを示す説明図、第４図は本考案
に係る真空装置のブロツク図、第５図及び第６図
はそれぞれ従来のバタフライ式及びスライド式の
可変コンダクタンスバルブの説明用斜視図である
。
１……ボデイ、２……気体入口、３……気体出
口、４，５……蓋、６……シヤフト、７……磁気
シールユニツト、８……弧状シヤツタ、１０……
ポテンシヨメータ、１１……回転駆動源（モータ
）、１２……回転伝達機構、１３……カム、１４
……リミツトスイツチ。
FIG. 1 is a perspective view showing one embodiment of the valve of the present invention, FIGS.
Figures a to c show the valve of the present invention fully closed (opening degree 0).
%), half open (opening degree 50%) and fully open (opening degree 1
00%), FIG. 4 is a block diagram of the vacuum device according to the present invention, and FIGS. 5 and 6 are explanatory perspective views of conventional butterfly type and slide type variable conductance valves, respectively. be. 1... Body, 2... Gas inlet, 3... Gas outlet, 4, 5... Lid, 6... Shaft, 7... Magnetic seal unit, 8... Arc-shaped shutter, 10...
Potentiometer, 11... Rotation drive source (motor), 12... Rotation transmission mechanism, 13... Cam, 14
...Limit switch.
Claims (1)
口３を設け、これらと直角位置関係にあるボデイ
１の開口を蓋４，５で密閉し、その一方の蓋４の
内面に他方の蓋５を貫通するシヤフト６の一端部
を枢支し、このシヤフト６の他端部は外部とのシ
ールを兼ねた磁気シールユニツト７で枢支せしめ
、当該シヤフト６にボデイの内面に沿う弧状シヤ
ツタ８を取付けると共に、他方の蓋５側にシヤフ
ト６の回転角度を検出するポテンシヨメータ１０
と、回転駆動源１１と、この駆動源１１の回転を
シヤフト６とポテンシヨメータ１０に伝達する回
転伝達機構１２と、シヤフト６に固定されたカム
１３により回転駆動源１１のオーバー・ロードを
防止するリミツトスイツチ１４を設置してなるロ
ータリー式可変コンダクタンスバルブ。 A gas inlet 2 and a gas outlet 3 are provided in opposing parts of the body 1, and the openings of the body 1 that are perpendicular to these are sealed with lids 4 and 5, and the other lid 5 is placed on the inner surface of one lid 4. One end of the penetrating shaft 6 is pivotally supported, the other end of the shaft 6 is pivotally supported by a magnetic seal unit 7 which also serves as a seal with the outside, and an arcuate shutter 8 is attached to the shaft 6 along the inner surface of the body. In addition, a potentiometer 10 for detecting the rotation angle of the shaft 6 is mounted on the other lid 5 side.
The rotational drive source 11, the rotation transmission mechanism 12 that transmits the rotation of the drive source 11 to the shaft 6 and the potentiometer 10, and the cam 13 fixed to the shaft 6 prevent the rotational drive source 11 from overloading. A rotary variable conductance valve equipped with a limit switch 14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5792589U JP2555801Y2 (en) | 1989-05-19 | 1989-05-19 | Rotary variable conductance valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5792589U JP2555801Y2 (en) | 1989-05-19 | 1989-05-19 | Rotary variable conductance valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02149406U true JPH02149406U (en) | 1990-12-20 |
| JP2555801Y2 JP2555801Y2 (en) | 1997-11-26 |
Family
ID=31583078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5792589U Expired - Lifetime JP2555801Y2 (en) | 1989-05-19 | 1989-05-19 | Rotary variable conductance valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2555801Y2 (en) |
-
1989
- 1989-05-19 JP JP5792589U patent/JP2555801Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2555801Y2 (en) | 1997-11-26 |
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