JPH02148U - - Google Patents

Info

Publication number
JPH02148U
JPH02148U JP7874488U JP7874488U JPH02148U JP H02148 U JPH02148 U JP H02148U JP 7874488 U JP7874488 U JP 7874488U JP 7874488 U JP7874488 U JP 7874488U JP H02148 U JPH02148 U JP H02148U
Authority
JP
Japan
Prior art keywords
ion species
plane electrode
insulating film
metal film
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7874488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7874488U priority Critical patent/JPH02148U/ja
Publication of JPH02148U publication Critical patent/JPH02148U/ja
Pending legal-status Critical Current

Links

JP7874488U 1988-06-13 1988-06-13 Pending JPH02148U (US07714131-20100511-C00024.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7874488U JPH02148U (US07714131-20100511-C00024.png) 1988-06-13 1988-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7874488U JPH02148U (US07714131-20100511-C00024.png) 1988-06-13 1988-06-13

Publications (1)

Publication Number Publication Date
JPH02148U true JPH02148U (US07714131-20100511-C00024.png) 1990-01-05

Family

ID=31303645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7874488U Pending JPH02148U (US07714131-20100511-C00024.png) 1988-06-13 1988-06-13

Country Status (1)

Country Link
JP (1) JPH02148U (US07714131-20100511-C00024.png)

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