JPH02148531A - Method of initial polarization and aligning arrangement of piezoelectric ceramic deflection type switching device sealed into airtight protective tube - Google Patents

Abstract

PURPOSE: To provide high insulation resistance and high voltage resistance between contacts by improving the flexibility of a flexible switch for an increase in the force of deflection, and increasing a contact pressing force for the elimination of flexible part displacement. CONSTITUTION: An airtight protecting tube 11 made of glass is mounted on top of a glass base part 12 for hermetic sealing, and a nipple 13 for connecting a vacuum pump no shown in the figure is formed on one side of the tube 11. Next, at least, one flexible piezoelectric ceramic switch device 14 is enclosed in the tube 11 and supported on the base part 12, while piezoelectric ceramic plate elements having a common inside conducting surface 15 and outside conducting surfaces 15D, 15E are previously separated and integrated as elements 15A, 15B. Next, a clamp means 17 is supported in cantilevered fashion inside the tube 11, and a conductive cap 24 having electric switch contacts is mounted at the movable free end of a flexible body 15. Thus even when the flexible body 15 is curved, a current is passed to contacts 29, 24 on a conducting rod 19 through a flexible braided conductor 26.

Description

DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD The present invention relates more particularly to air-tight protective tubes evacuated to high vacuum or filled with a protective atmosphere of inert gas. and the corresponding current from a few volts to 5000 volts (5 kilovolts)
or higher voltage ranges;
And in the background prior art it was possible to have a large number of such structures without mutual influence in a single common hermetic protection tube, with current ratings from 50 amps to hundreds of amps or more. For high power class circuits with power ratings from a few volts to 5 kilovolts or more,
Electromagnetically actuated (PM) relays and switches have been used. Although satisfactory in many respects, these 8M relays and switches are bulky, heavy, slow to respond, and generate excessive arcing and sparking between the contacts during open and close operation due to atmospheric operation. Tend.

For many practical reasons, due to their bulky, heavy and evaporative nature, known EMIJ relays and switches can only be used in air and cannot be enclosed in evacuated hermetic protection tubes.

Operation in air results in long-term arcing induced during the opening and closing of the contacts of the 8M relay and switch. This is due to the ionization of the air gas medium in the space of the contact 1!1 when the contact opens and opens, and as a result, the operating life of such a KM device is greatly shortened, leading to maintenance problems and Costs will increase significantly. Furthermore, E.M.
The device dissipates a significant amount of heat and cannot improve performance because it is not operated at voltage (valley ft).

Finally, operating the contacts of an EV device in the air induces oxidation of the contact surface and causes contact A! II resistance can be greatly increased.

Relays and switches that use piezoelectric drive elements have many advantages over their electromagnetic (EM) drive counterparts. For example, a piezoelectrically driven relay or switch draws substantially less current during operation of the load N, opening and closing of the current carrying contacts, than an electromagnetic drive of the same power rating;
In addition to consuming very little power, piezoelectrically driven switching devices have a very low bulk, take up little space, and add little weight to the circuit system in which they are used. Finally, piezoelectrically driven switching devices can have extremely short actuation times, so that the corresponding EM
It has a much faster response than the conventional method. Namely.

It consumes less power and generates less heat than an 8M relay or switch with the same power rating, allowing for faster switching in a smaller, lighter device.

Many different piezoelectric ceramic switching devices of various constructions have been sold in the past. One of the more common purchasing approaches in these known devices is to use vi! A nine pie-self flexure type piezoceramic plate is constructed using two adjacent piezoelectric plate elements having a conductive electrode coating on the outer surface and sharing a common conductive surface on the inner side to form a pie-self flexure. It is called an itchinda device. The known commercially available Py-Self flexure-type pressure 1i ceramic switch is based on a 1978 authored application published by Biezoderodak D. Vision Notes of Galton Industries, Inc., Metuchen, New Chassis, and Footeton, California. It is described in 52i1ryu'. Another such prior art piezoelectric ceramic switching device is described in U.S. Pat. No. 2,166,763, issued July 18, 1939, for "Press WL Device and Circuit." 1939
Over the years, piezoelectric ceramic residual type switching devices have been the subject of extensive efforts to improve their properties. This reflects the relatively large number of patents issued in the years leading up to the present, such as U.S. Pat. , No. 714, 642, “
U.S. Pat. Issued US Patent No. 4
, 403, 1156. Such piezoceramic flexural switching devices are described in the text book ``Manual of IC Machinery'' by Douglas C., Gree/Watt, published by McGraw-Hill Publishing and copyrighted in 1965. is also listed.

Until now, piezoceramic flexure relays have been used only for a variety of applications, including the switching of low-power class electrical circuits (i.e., circuits with signal levels with voltages lower than 20 volts and corresponding currents of the order of 1 milliampere). It has been described as being used in 4 circuits. φActually, there were no relays that were made public. Also, to date, serious efforts have been made to improve the power rating of piezoelectric ceramic flexure relays. The biological conditions required for a deflection actuated relay are:
The small gap created between the flexure actuated switch contacts when opened and closed is responsible for their ability to withstand voltages applied thereon by external circuitry connected to the device. Contact 11 after current stops
In order to improve the voltage resistance of this gap +111, it is recommended to choose a yA ambient atmosphere such as vacuum or an inert gas or a high dielectric strength gas such as nitrogen and argon or sulfur hexafluoride (SF6). It's advantageous. In such a maintained vacuum or inert gas atmosphere, the spaces between the contacts can have as high a dielectric strength as possible. This means that if you change the circuit to be switched to operate at a few volts or 5000 volts/volt, the time required to achieve that gap will be faster. This is because it means that high voltage operation is possible.

In a paper presented in 1965 at the Relay Conference sponsored by the Institute of Electrical and Electronics Engineers (IILEE), Ronald II, Tet and Robert W. Hansen, in an earlier publication entitled "High Voltage Switching with Vacuum Relays" reported that a relay (not a piezoelectric type) was operated in a vacuum. There is no explicit disclosure in this publication of the mechanical details of the construction of the switch or how the contacts are arranged to operate in a vacuum. Furthermore, as of today, no practical high power vacuum relays are commercially available. Furthermore, IE
At an academic conference called the Holm Meeting held by EE in 1978, it was announced that ``an electret-driven 11L air relay, operating in a vacuum tube, with a low A No. 8 level (20
However, due to its nature, electret is not suitable for use in stirrups during degassing and does not retain the load, so long-term use is not possible.

To the best of the inventors' knowledge, no piezoelectric ceramic switching devices suitable for operation at high power levels have been published or operated in vacuum or in an airtight protective tube in a Fi-protected inert gas atmosphere. There was no use at all.

SUMMARY OF THE INVENTION Therefore, the first object of the present invention is to provide a 9C seal containing a piezoelectric ceramic snitching device! To provide a new and improved piezoelectric ceramic power switching device designed for operation in a vacuum or protective inert gas atmosphere maintained within a tube, the piezoelectric ceramic switching device is , a few volts and a corresponding approx.
Designed for use in high power kufus circuits ranging from 0 amp current ratings to 5 KVt or higher and corresponding hundreds of amp current ratings, and operates at lower voltages and powers in signal level circuits. It is possible.

Another object of the present invention is to provide such an improved piezoelectric cefmic power switching device having a plurality of such switching devices mounted within a single common hermetic protection tube. It is in.

Yet another object of the invention is that the
and provides such a novel piezoelectric ceramic power switching device using a piezoelectric plate element having a non-polarizable portion on which passive circuit components and/or active semiconductor devices are mounted, such as resistors, capacitors, etc. It's about getting started. Such circuit components may be connected in circuit relationship to each other and to switching devices and may be constructed using separate printed circuit or integrated circuit fabrication and implementation techniques, so that they may be capacitive in nature. ,
Stray impedance in a circuit, whether inductive or resistive (which is present in all electrical circuits), can be reduced to an absolute minimum. In one embodiment of the invention, such circuit components and active semiconductor devices are coplanar and hermetically sealed! I! Inside the tube it is equipped close to the piezoelectric ceramic nutching device to which it is connected.

It is a further object of the present invention to provide such a novel piezoelectric ceramic power switching device within a protective tube that imparts improved flexibility to the device, thereby reducing deflection forces. Increasing the displacement, the deflection contact is pre-assembled with respect to the fixed contact with which it co-acts (<8) and the polarization and spacing are suitable for the vacuum or protective gas atmosphere in which it is installed. Its purpose is to enable operation of the switch contacts at high voltages due to its high dielectric properties.Designed to operate in air due to the protective atmosphere and inherent gas evacuation when evacuating and sealing the hermetic tubes. There is no need for heavy coating or encapsulation of the piezoelectric ceramic plate element containing the elastic material, which is necessary for the ceramic material used in the production of ceramic materials.In order to reduce the di/old when the current stops and generate a stable arc. It is possible to use contact materials with a low point of contact and at the same time a high dielectric strength for improved high voltage resistance when the contact opens and the flow stops when the current stops.Vacuum or protective gas atmosphere. High absolute performance obtained when operating improved materials in
& resistance, voltage resistance on the order of 2000 ports per mil can be obtained through properly designed contacts in the rounding of such devices. Moreover, the repeatable and reliable timing of deflection drive, contact closing, undeflection, contact opening and reverse deflection assistance as desired is optimized by the present invention since the zero gap dimension is minimal. Power and other deleterious dynamic factors can be better controlled through proper design.

In order to implement the present invention, it is necessary to use a return type piezoelectric self-mixing switch of the floor IiI calculation system VI, t)! ! t is provided, which is fixed to the base part so as to form a hermetically closed seal inside the 9fcv! ! Including protection tube.

At least one flexible piezoelectric ceramic switching device is fixed within the hermetically sealed protective tube, each having at least one inner wall formed on its flat surfaces, each with respective terminal means for applying an energizing potential. A pair of plate elements having conductive surfaces of M61 and M61 are fixed in a sandwich-like manner to constitute a flat, pre-registered two-piece Gf type piezoelectric cefmic plate element.

A flexible piezoelectric ceramic switching device vlVi is physically supported on said base by means of clamping fixed on both sides of the aperture, which base also has a flexible part such that one end thereof is free to move. , is physically supported in a cantilevered manner within the airtight tube. A first movable electrical switch contact means is mounted within the hermetic tube in conjunction with the free movable end of the flexure, which cooperates with a second electrical switch contact means also physically mounted within the hermetic tube. The second electrical switch contact means bends the flexible portion to
When an energizing potential is selectively applied to either one of the piezoelectric plate elements to cause the first and second electrical switch contact means to close and allow current to flow therethrough, the first electrical It is adapted to be selectively engaged with the switch contact means. Each conductive load current lead means.

@1 and one of the second electrical switch contact means, the first and second! Gas switch contact means extend to respective terminal means supported by the outer hepene portion of the hermetic protection tube for selectively applying load current to loads external to the tube.

In a preferred embodiment of the invention, the portion of the piezoceramic plate element clamped by the clamping means is unpolarized, electrically neutral and physically unstrained.

Another feature of the present invention is to physically equip one flexible piezoelectric ceramic switching device in the above state in a common 9' In one embodiment of the present invention constructed in this manner, each flexible piezoelectric element is mounted within a common protection tube and is operated separately to control the load current flowing past the actuated switch contact. The ceramic switching device 2!υ operates independently of other switching devices installed in the same common storage unit.

In yet another embodiment of the invention, a plurality of flexible willow piezoelectric ceramic switching devices mounted within a common protection tube are selectively combined with selected nine other switching devices mounted within the same common protection tube. This allows them to work together in an interdependent manner.

Another feature of the invention is that the hermetic protection tube is permanently evacuated;
The object of the present invention is to provide a novel switching Ve@ configured in the above-mentioned conditions, characterized in that the piezoelectric ceramic device or devices installed therein are kept in a high vacuum throughout the operating life of the device.

In another version of the invention, a piezoelectric ceramic switching device mounted within a gas-tight tube is maintained in a protective inert gas atmosphere.

Yet another feature of the invention is that the flat piezoceramic plate element of each flexure device has a non-polarizable portion projecting from the clamping means in a direction away from the pre-squad movable flexure portion thereof; An object of the present invention is to provide an improved switching device characterized by maintaining neutrality and virtually no distortion.

Ve@ configured in this way is further supported by the non-polarized portion of the piezoelectric cefmic plate element, and mutual K
In addition, the switching device is equipped with an electric circuit component consisting of a passive circuit element such as a resistor or a capacitor or an active semiconductor device electrically connected to the switching device circuit. This makes it possible to reduce the stray circuit impedance of the circuit connected to the switching device to an absolute minimum.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a side view of a novel and improved piezoelectric ceramic power switching device using a 9C tube constructed in accordance with the present invention. In FIG. 1, a glass lightning protection tube is designated 0u, which has one end resting on a gaff space Gz for supporting the glass tube and hermetically sealing the interior of the tube. It is shaped like an upside-down wide-mouthed glass bottle with a 3-inch opening. KJ1 vacuum pump equipment is used to degas the inside of the glass tube 0υ to a high degree of vacuum.
f1 (not shown) Form one of the glass tubes aυ (III K%r131) for the K connection.

Manufacture of a protective glass tube aυ and its fixing to a base part N7J preferably made of glass or an insulating, gas-impermeable Buchstick insulating material, Published by Addison-Wasley Publishing Co., Reading, Massachusetts.
Fred A. (Bury, Handbook of Electron Tubes and Vacuum Tube Technology, published by McGraw-Hill, New York and London, 1937, 4th edition, Austin B. Eastman, Textbook of Fundamentals of Vacuum Tubes, New York and London) McGraw-Hill Company 19
Second edition published in 1944, Barbert J, Reich fY.
The method is carried out according to well-known and well-established electron tube manufacturing techniques disclosed in previous publications such as the textbook ``Theory and Application of RLL Tubes''.

At least one flexure-type piezoelectric safety switching device, generally designated I, is mounted within the hermetic tube 0υ and is physically supported therein by a base portion σ2. A flexible individual piezoelectric semi-mix switching device I, best shown in factor 4, comprising a flexible section (151), is fixed side by side in a sandwich-like manner and has at least one inner conductive surface that they share. (15C) and the outer conductive surface (
Two juxtaposed pre-polarized planar piezoelectric cefmic plate elements (15D) and (15E) forming an integral structure together with the piezoelectric ceramic plate elements (15D) and (15E).
5A) and (15B) *0G
, (16A) Oh! Respective electrical terminal means shown in (16B) and (16B) are provided for applying an electrical actuation potential difference to the inner conductive surface (15c) and to each of the outer conductive surfaces (15D) and (15E), respectively. ing.

The flexible piezoelectric ceramic switching device u is (171
It is physically mounted on the base part α2 in a cantilevered manner within the airtight tube C11l by means of a clamping means shown in . The clamping means an comprises a set of cooperating clamping parts (1
7A) and (17B) φ1, which are arranged on the opposite side of the 9% bending part 051, and the lower end of the 9% bending part is sandwiched between the clamp parts (17A) and (17B), and the bending part The movable end extends upward in a cantilevered manner.

Clamping portions (17A) and (17B) are fixed to and supported by a pair of relatively rigid, upright, spaced apart conductive contact supports 0δ and 09, with flexure portion 09 disposed between them. It is held in a sandwich style,
The entire structure is held relatively firmly together by through bolts and nuts shown at +211. Clamp part (1
7A) and (l)B) are made of conductive material and are fixed to the nine terminal leads (16A) and (16B).
and make good electrical contact with the outer respective conductors (150) and (15E) on the piezoelectric ceramic plate elements (15A), (15B) to apply a potential difference to their surfaces. K so that you can make a connection with it. Since the piezoceramic plate elements (15A) and (15B) are good electrical insulators, they are connected to the outer conductive surfaces (15B) and (15E), respectively to the clamping parts (17A) (17B) and the conductive leads (16A). ) (16B) should be noted to provide electrical insulation to the connections with their respective terminal lead connections provided by (16B). The clamp portions (17A) and (17B) are separated from the conductive contact support rods (181 and C9 by 1.0 mm by the insulating surface and Ω, respectively. Fabrication of the flexible piezoelectric semi-mix switching device α) and , a preferred mode of operation, including excitation (to be fully described below with reference to FIGS. 5 and 6), is published concurrently with this application.
"Cefmic Switch 7G System and its Excitation Circuit"
John D., Berndhan, Jr. and Wiliam'P, Cone Lamp Name US Patent Application @J (GED
-2024), the disclosure of which is included in the disclosure of Nanoma Ichiki Gan.

As described in Section m1, the flexible portion uS is supported by the clamping means (17+) so that its movable free end is supported in the center of the space formed between the free ends of the upright conductive contact support rods q8 and C9. 9cwpf!av is supported in a cantilevered manner.The movable free end of the flexible body d9 is connected to the outer conductive surface ( 15B) and (15E) in the form of a conductive cap fixed thereon. Between the cap and the insulating cap there is a flexible copper contact indicated by ■. The knitted base ω is fixed, and this is connected to the conductive cap α4.
In order to provide a current path between the U81 and U81, an upright conductive support rod is placed in the center of the keyaki tree. It hangs down to 181 and is fixed there. Similar conductive knitted belt (to)
is from the left side 1 of the conductive cap Q4I.

It runs to the center of the total length of the upright 4wL support rod aj as shown in Figures 1 to 3, but in Figure 4 (2)
Not shown for simplicity.

The lower ends of the four conductive threaded bars ■ are connected to the respective upright conductive support rods σ & and σ by screw-nut assembly fixings α.
] is fixed.

To complete the flexible switching device α7, second electrical contact means, designated K, ■ and ■, are connected to the free ends of the upright conductors [contact support rods 0 & and α9, respectively, as best shown in FIG. Fixed. With this arrangement, when the flexible portion α9 is bent and the first movable contact 241 is brought into contact with the contact □□□ on the conductive rod portion σ], the conductive load current path is closed from the upright rod portion σ9. and [
], then further through the flexible rope conductor■,
It can then be seen that an upright conductive rod Q8 is formed back to a load device (not shown), which provides selective flow through the piezoelectric ceramic switching device I. Similarly, when the movable contact (241) closes the fixed contact, the closed-circuit load 11m path passes through the closed contact Cφ and (g), and then the conductive belt 4 (Fig. 4) connected to the conductive rod part a9. (not shown) and further through the power supply and the load.Therefore, first and second electrical switch contact means consisting of a movable contact (to) and a fixed contact. Each has a hermetic protection for plugging into a cooperating socket (not shown) on a circuit board or other component.
Terminal pin q81 supported by the base on the υ
and a respective terminal means consisting of 09 and 09;
q] is given. That is, the load on the load tflf.

can be selectively supplied to the outside of the tube via the first and second M, 4JC Nutsch contacts (241, @ or 241, respectively). In the '4N! aspect of the invention, the lead terminal means includes a flexible conductive belt portion, but the lead means need not necessarily constitute such a flexible conductive belt; As fully described in the sl! ) or (15g) and their corresponding terminal edges oe, (16A), (16B) etc. It is.

3All shows an improved version of the power switch contact system that can be used in the DK switching devices of FIGS. 1-4 instead of that shown in FIG.

In the fpJ3 A figure, the first set of fixed contacts and (2B') are fixed at the ends of the flexible part (151) and the contacts fixed at the ends of the flexible part (151) are on one side of the movable switch contact system consisting of and (24'). Vt is provided on mutually spaced support points (not shown, but similar to the bosses in FIG. The second set of fixed contacts (29') are connected by the bridge part (24A) to the flexible part a on the post 0g, facing the movable contacts C74J, (24'). Fixed contacts Ql and (28') and Ql and (29'
) are insulating rod parts (28A) and (29A), respectively.
from (for example) a load current source physically connected to and connected through the braided conductor (
26') and (21') to apply a load current to a load (not shown) connected to the braided conductor □□□
electrically connected to. This contact IfHPJ causes the movable flexible part to move to the movable contacts (241 (24') and
When and (28″) are closed, the current flows through the contact (c), Q
, 41, Bridge conductor YFf, rod (24A) and contact (
24') and (29') to the load. The flexible part is in the opposite direction KI#J, and the fixed contact θ
, (2R') on the movable contact f241. When (24') is closed, current will be supplied to the load via the conductive bridge (2RA). Note that in this construction, the movable flexure does not need to be fitted with any of the braided conductors.

Constructed as shown and described in connection with FIGS. 1-4, it is equipped with nine flexure-type pressure tubes in a closed degassing tube. In the cefmic nutwitching device, it is possible to pre-polarize the piezoelectric cefmic plate elements (15A) and (15B) on the spot after the device is characterized by the method described above. As more fully disclosed in the above, the water in the movable flexures of the piezoelectric ceramic plate elements (15A) and (15B) Input pre-polarization is achieved by applying a high potential difference to the plates via conductive lead means (16A) and (16B), respectively. A prepolarizing high potential difference can be applied while the plate is held at a temperature just below its Curie point.

This can be carried out immediately after the bake-out of the evacuated hermetic tube αD, producing the industrial embodiment of the flexible piezoelectric ceramic switching device according to the invention. For continuous degassing of the tube aυα2, industrial implementations may not include the nipple u3; the necessary bakeout and degassing techniques are given in the Vacuum Tube Technology Textbook described by 9iT. is fully described. In many applications of the present invention, it is desirable to use a known and well-established gettering technique, such as a flash getter, after V-ing the tube as described in the Vacuum Tube Technology text above. Rings can also be used to advantage. By combining degassing and bakeout techniques with gettering, good cleaning of vacuum-tight tubes can be achieved at a much lower cost.

After degassing and bakeout, a high pre-polarization potential difference is applied to the conductive surfaces (16A) and (16B), respectively, while keeping the temperature of the piezoceramic plate elements (15A) and (15B) just below their Curie temperature. , while the common conductive plane (15C) and its terminal aQ are of opposite polarity and F'i is made substantially at ground potential. At this point, while the piezoceramic plate elements are kept in vacuum, a high pre-polarization potential difference is applied to them, and also the high dielectric potential wL of the vacuum.
iif increases the pressure ゛ζ during the application of a high prepolarization potential difference.
There is much less chance of flash failure or arcing through the ceramic plate. Even higher pre-polarization potentials can be used, resulting in optimization of the flex-dead actuation characteristics, such as faster response times and improved contact force, as discussed below. Room temperature polarization is also possible, as the Curie temperature can be approached during sealing and bakeout with a new flexible material that allows in-situ separation at room temperature, providing a completely new technology for piezoelectric aha. become.

1P Loss IP US 14 Patent Application 2 (GE
D-2024) The pre-polarization of the movable deflection plates (15A) and (15B) is done by changing the physical dimensions of the plate compared to before the pre-polarization. This change leaves the molecule k
A permanent increase in the physical dimensions of the ceramic plate elements (15A) and (15B) between tfM (15D) and (15B) to (15c) and (15E) to (15c) and parallel to Kk (i.e. 4) along the longitudinal dimension of the device shown in Figure 9) manifests itself in the form of a progressive reduction in physical dimensions. After that, the vjA characteristic is the same as the pre-polarization potential difference, but is the voltage 9 smaller than that for polarization? lE pole (15L)) ~ (15C) or (15E)
When applied as an energizing potential difference between .about.(15C), the plate element (15A) or (15B) further expands in the polarization direction transverse to the electrodes for a time of 1! Constrict parallel to the pupil. This is a trap, (wrapped part G51t'i
0 The plate element bends in one direction or the other as it is energized.With the exception of the selectively applied energizing potential difference, there is a temporary expansion in the squad direction transverse to this voltage ff1K!
The temporary contraction parallel to & is canceled, and W@mi part (151
returns to its normal, rest-unenergized central position. That is, the movable-flexible portion σ can be selectively bent to one side or the other by twin increase by applying an appropriate energizing potential difference to it, selectively causing either contact C241-■ or Q4J-@ Then, when the energizing potential difference is removed, the internal compression spring force automatically causes the contacts ca-c81 and G-contact to return to their initial pre-polarized resting center position and open the contacts ca-c81 and G-contact. You'll see what happens.

Having thus far described, a particularly desirable feature of the present invention is the contact r24! This is the ability to accurately control the movable contact Q41 located at the center so that the flexible part α5 is placed in the center so that it is accurately centered with respect to the fixed contact (3). This is l! The magnitude of the prepolarization potential difference applied in situ through the respective plate elements (15) and (15B) during the prepolarization, which is all carried out outside the sealed hermetic protection tube as described in i'lfn. Appropriately y41
This is achieved by rri. This novel centering technique allows for significant device fabrication cost savings by combining pre-polarization and centering fabrication steps into one.

A piezoelectric ceramic plate element (15A
)i or (15B) to selectively energize.
This overload application circuit is disclosed in the gIB diagram of co-filed U.S. Patent Application No. (GgD-2024),
Reference is made to the description of FIG. 1B for a complete disclosure of its structure and operation. Due to its weight, the energizing circuit is not shown in the drawings of this publication, but approximately 90% of this circuit is connected to the piezoelectric ceramic plate element (15A) or (15A).
5B) is smaller than the prepolarization potential difference, but
It can be said that it operates to selectively apply energizing potential differences of the same polarity. This energizing potential difference further results in an increase in the dipole array, which is connected to the plate element (15A).
or (15B) is reflected in temporarily making one or the other thicker and shorter. The temporary thickening and shortening of one of the plate elements allows the free movable end of the active flexure to be sufficiently thickened to selectively close the movable contact CI'41 to either the fixed contact or (g). K that results in physically bending the K
Become.

The contact 24J -cat or - which carries the load current is 1
Each selectively energized pressed ceramic plate element (15A) or (15B)K remains closed as long as an energizing potential difference is applied.

This can continue for up to infinite time. That is, Figures 1 to 4
The switching device shown in the figure can be used as either a normal circuit or a normally closed switching device.

The above characteristics are achieved due to two main features of the switching 81& disclosed herein and also by appropriate design of the energizing circuit used. First, piezoelectric ceramic plate element (15A) and (15B)
, essentially a high quality capacitor with no or little loss when charging (when K pressure is applied). Second K,
Any losses that occur over a long period of time are immediately and continuously replaced by the energizing potential that is continuously applied via the energizing circuit. Thirdly, a finally the respective piezoelectric ceramic grating elements (15A) and (15B)
The energizing potential selectively applied to is constant K, the preparatory portion FIP't! used to initially prepolarize the piezoceramic plate elements (15) and (158). Since it is applied with the same polarity as the IL position, there is no chance of long-term polarization effects making the device unstable or unpredictable during long-term operation since the dipole alignment is continuously enhanced. .

Piezoelectric ceramic plate element (15A) or (15B
), the active movable part 1151 returns to the neutral unenergized position in the neutral state M, thereby closing the contact Q4 through which the load current passes. Open either ~@ or @~. At the time of this description, the reserve) as well as ′)
Actuation by a selectively applied energizing potential difference causes the outer conductive surface (1!5B) to
It should be noted that this can be achieved by potential differences of either positive or negative polarity measured with respect to (15C) or (15C).

With an operating life of 7 ntj, the power switching S&RM spends most of its life with its contacts pressed firmly against each other to carry normal system load current, however.

In conditions where it is desirable to disconnect the load current through the switching device, the contacts must be separated.

This results in the ignition of an arc discharge in the space created between the departing contacts of the device, which is then extinguished and the 1! between the contacts is extinguished. Achieve interruption or cessation of flow.

this miu, john of new york, new york state,
"Theory and Applications of Vacuum Arc" edited by JLM and Fufferty, published by Wiley & Sons in 1980.
George, who is the co-author of this book and one of the co-inventors of this application, in the text book, especially Chapter 3.

It is fully explained in ``Arc Extinguishing Method'' by A. Fahoul. On page 81 of this textbook, it is stated that two cylindrical metal hooks (contacts) held with their flat surfaces facing each other are each smaller than the apparent area of the cylindrical ends of the contacts. It is said to have an actual contact surface. This is 5I! Ura's flat VF,
This is a natural consequence of the fact that the surface of the poles (contacts) is visually very rough. When you match the electrodes (contacts),
Endoscopically convex areas on the opposing surfaces first make contact. When a further compressive force (called contact compressive force) is applied to the contact point, the initial contact area or surface group deforms elastically or ■1Note, causing the whole or contact surfaces to approach each other a little more closely. to allow other protrusions to supplement the initial contact. As a result, the total contact surface is also rounded up from a large number of microscopically small areas (which vary statistically in size and number), and it is determined by the compressive force applied to the contact point, its microscopic surface finish. , and the elastic/plastic properties of the material from which the contacts are made. This property has a wide impact on the formation of arcs in the area formed as the contact part and carrying the load current.

For the reasons given above, the real contact area is given by Rc = P/ (2a) Ill \'rrL air resistance total resistance from several separate small areas integrated to form one large circular composite area It's finished.

Here, P is the resistivity of the contact material and a is the composite radius. Since the load current passing from one electrode to the other is carried across the contact area d, the value of Rc is often referred to as the compressive resistance or more simply the contact resistance. The effective internal contact area is determined by contact compression force, contact surface finish and contact material! I have already mentioned that it depends on the i41/Wi sexual nature. Therefore, the same buff meter can be expected to influence Wm contact resistance Rc K. It should also be noted that contact resistance can be affected by the formation of films such as oxides on the contact surfaces. However, for individual cases of vacuum sealing or inert gas protective atmosphere,
The contact electrode is completely clean throughout and its round contact resistance depends primarily on the buff meter described in equation (1) above.

To illustrate the amount of effective contact area that can be achieved in a typical EM driven a
Pressured with a load of kilograms (KO) x5KVI7)1
It was tested at % empty shutdown and consumed less than 14 watts at a normal load current of 600 amps. It was thought that approximately third of this power consumption was due to contact resistance. From this it can be concluded that chamber F1 has a contact resistance of less than 14 microohms (pΩ). Assuming this value of contact resistance, the area of a is found to be 6.4 x 10"'' meters, and the corresponding contact area is 1.3 x
It can be seen that lo=square meter.

This is the apparent contact area of the contact system in question, 10-7
However, since the compressive resistance region is clearly not at room temperature, the actual contact area achieved should probably be slightly larger. However, examples show that the actual conductive area connecting two closed circuits and nine contacts is
It's much smaller than you would expect from looking at the two Itchinda devices in question.

It has been actually measured that the compressive resistance Rc changes by a factor of 1/2 to 1/3 depending on the compressive load force applied to the contact. At this point, in addition to all the desirable properties embodied in a piezoceramic switching device operating in a hermetic vacuum tube, there is no depolarization (antipolarization) effect on the piezoceramic plate elements (15A) and (15B). After closing the movable contact (to) on the fixed contact +281 or a selected one of the prisoners, the excitation force applied to the flexible plate elements (15A) and (15B) is maintained in series. The ability to continuously maintain a compressive force of 1% on the selectively closed switch contacts indefinitely, thereby keeping the compressive resistance Re at a minimum value during an infinite period of operation. It is important to note that it is possible. Furthermore, due to the greater prepolarization and energizing potentials made possible by operation in a vacuum or inert gas protective atmosphere, the compressive force exerted by the catch is lower than that of a device operating in air. Page 86 of the textbook ``Theory and Applications of Vacuum Arc'' referred to above discloses the formula % (21), where Ve is the value of the two contact surfaces. is the critical speed of separation of , is the thermal conductivity of the contact material, is the load current flowing through the contacts, and %C is the heat capacity of the contact system. From this equation, the load current in IQO amperes is For the separation of contact electrodes passing through the contact system, it has been shown that the critical speed of separation for contact systems made of copper is 5 meters per second, while for stainless steel it is 1eF110 meters per second. In the l5 KV, 16('') O Ampere vacuum circuit breaker example mentioned above, the contact separation rate when the contacts begin to separate is on the order of 1 meter per second.Explained and defined on page 83 of the textbook During the initial part of the contact separation during the formation of the insulation displacement bridge, which produces an arc such as They can be designed to be ideally matched because the selected and reversed mirrors are designed to first aid and accelerate the initial separation action, and after arc formation to improve electrical disconnection. This is because it is possible to design the device's energization circuitry with the ability to apply a programmed energizing potential to both elements. , which can then be removed within a few microseconds following a current stop to avoid overshooting the neutral center position.
If it occurs as described on pages 106 to 106, it may be quite possible to overcome the contact welding effect.

All characteristic effects encountered during its operating life and (241-
@ or C! In an effort to harmonize the design of such contact systems, it is important to provide each contact system with the appropriate L/D aspect ratio. KotoK
Lt - equal to the area of the contact surfaces of the pair (rb x length), and D is the minimum area between the microscopically small convex regions generated as protrusions on the contact surfaces of opposite pairs as described above. equal to the gap. It is also desirable to use low melting point materials to reduce di/d1 effects at "current chop" (the point at which the current flowing through the contact system dissipates). It is also desirable for the contact material to have a high fI current so that it has a high voltage withstand when the contacts are opened.A preferred switch contact system for use in an iG susceptibility switching device constructed in accordance with the present invention is a copper-Panajiwam alloy. It has the desirable properties of a relatively low melting point and high voltage stiffness after the current is turned off. To further disclose the 1η-vanadium alloy contact system, we would like to cite George A., Farall, co-inventor of the present invention.
, Zenev ~: pJ! named "Electrode Contact for K-Current Circuit Interruption" handed over to Electric Company! No. 399,669.

A particularly advantageous feature of the present invention is to increase the voltage resistance at contact opening by keeping the contact system, such as the copper-panadium alloy contact sinutem described above, in an unduly protective inert atmosphere of a 3-tight vacuum tube or pond. A contact system with a voltage withstand of about 30 KV/cm in air can be increased by a factor of 3 or 4 or more, e.g. 6 ms, after interruption of the load current flowing through it. It has a voltage resistance of 9O-100KV/cm. This means using appropriate contact materials such as protective vacuum-tight tubing or protective inert or highly protective
! A contact and a pressure W for passing a load current into a gas-tight tube filled with a gas atmosphere of 100%, and a deflection actuated nuitting device r! It will be appreciated that the encapsulation of Ii provides significant operational benefits with the present invention.

FIG. 5 shows a different 5N implementation of the invention, in which the same reference numbers are used for the same parts as were used for the embodiments of the invention shown in FIGS. 1-4. FIG. 5 shows a plastic or glass base O3 in the shape of a cot
The glass envelope 1 inserted into the is indicated by aυ, and it can be attached to the base with a suitable adhesive or by a glass frit seal if the glass envelope 1 is made of glass. Hermetically sealed.

The piezoelectric semi-mix switching device I has a mounting part (171
This mounting is generally circular in construction and sealed to the side of the glass tube CIl+ by a gaff frit seam /L/ (not shown). The clamp part (171) described as being made of glass may be made of plastic, but it must be insulating and capable of degassing. A subassembly consisting of a fixed rod support for the fixed contacts C and (1!1) is inserted through a suitable pre-formed opening in the clamp part, and a flexible part (151) is inserted into the clamp part. , can first be assembled outside the glass tube σD (II) by inserting it into a suitable central opening designed and pre-formed in the clamping part to accommodate it. The lower part of the flexible part (151 is inserted through the hole of 6. By using the gaff frit seal lvK shown in (1) in Fig. 6, or by using a suitable contact Itn with the minimum Ganum output characteristic.
It is firmly fixed in the clamp part (171) by l.

'fi! of Figure 5 of the present invention! The piezoelectric cefmic bending part ('I51) used by lfA@ differs from that shown in Fig. 4 in many respects.The first and most electrical difference is the clamp part αη
A piezoelectric ceramic grating element (1
5A) and (15B) and under the clamping part (17) (the suspended part is not pre-polarised and is therefore indicated with reference numbers (15AUP) and (15BUP)).9 This part of the plate element is not polarized and electrically The portion of the piezoelectric ceramic plate element indicated by (15) and (15B) located above the clamp part aη is previously polarized and Therefore, it is electrically charged in the same manner as shown in FIGS. 1 to 4, and the strain force is physically removed.

The second important difference in the fabrication of the waste section U shown in FIG. , the outer 4ii plane (15D) and (15D), respectively.
g), see reference 4ij-(15cl.
) and (15c2). Two grate elements and their adhesive conductive surfaces (15C1) and (1502) form the adhesive layer α in the center.
- and the contact y# layer can be either insulating or conductive depending on design criteria and intended application. Center tangent ff? If the layer is insulating, a gap is formed between the two halves of the top surface of the conductive cap (241) and a separate electrically isolated movable contact is placed above the movable end of the recess (15). Surfaces (24A) and (24B)
Grant. Jumper conductor (16k) and (16
B) and through the thin surface-mounted terminal pads shown with the same reference symbols as the jumper conductors connected thereto, the continuous pre-distribution potential difference and the actuation potential difference of the respective ! A voltage is applied to the conductive surface of the wire.

In the same way, apply the IW level and close either half of the movable contact (24A) or 1i (24B) on each -11 constant contact @ or (c). The inner conductive surface (15
From C1) and (15c2), jumper conductors indicated by (16·(1)) and (161(2))j are attached to the corresponding numbered terminal bins. As best shown in FIG. 6, a jumper conductor (16A) and (
16B) with a suitable hole through which the sixth
This jumper conductor is tightly sealed closed by a gaff frit or a suitable shielding agent as shown at C in the figure.

This same arrangement is also performed where the terminal pins for each conductive wire pass through the bottom of the base portion 117J, but for simplicity of the drawing, such sealed passageway sleeves are not shown in detail. .

The third important feature of the present invention is that the unpolarized portion (15A
tJP) and (1!5i3UP). A medium-heat conductive surface (15
Suitable electrically conductive surfaces, indicated by ■ and fields, are formed on these non-polarized parts of the piezoceramic plate in order to jointly form at least one capacitor with c1) and (15C2). If it is necessary, more than one capacitor can be made by suitably dividing the conductive surface on the 1A side or the 3 sides or both into the desired number of capacitors. In addition, other circuit components designated (B) and G, including independent printed circuit or hybrid integrated circuit resistors or miniaturized semiconductor active devices,
On the conductive surface or on top of the CΩ, the coil is mounted directly on the non-polarizable part of the piezoceramic plate element. Such circuit components are described in the above-mentioned US Patent Application No.
F 7D-2054) In the manner fully described,
If a special circuit configuration is desired, printed conductors (not shown) can be connected to jumper series connections and terminal bins (32
A ), (33A), (34A), shi and (35A
) are connected in circuit relationship. By fabricating a piezoelectric ceramic nutching device in this way, the inductive ,
It is possible to reduce stray circuit impedances, whether capacitive or resistive, to an absolute minimum, thereby ensuring reliable excitation and operation of the piezoceramic nutting device.

Inert gases such as nitrogen, argon, helium and 11
For such devices intended for use in a protective atmosphere of high R conductivity, such as 8F6, the flexure σ9
It is preferable to apply an outer structural coating of a protective material designated K (15F) above the pre-polarized portion of the pre-polarized area. The possibility of destruction is further reduced. A suitable coating material for this purpose, which significantly impedes the movement of the flexure (151), is a polyimide siloxane compound, which is excellent in passivating pinhole-filled surfaces. It can also be used as a glue in the flexure m layer to secure two flexure plate elements, as shown in Figure 5, without the risk of leakage. Other adhesive materials that can be used in vacuum applications and which can be baked at high temperatures include GEMII (imide ether), PIQ (polyimide, isoineroquinzolian and dione), and PEK (polyethylene ether). ketone), U
LT IV (polyethyl urethane) or [JLT
Examples include EM (polyetherimide).

The selective deflection shown in Figure 5, combined with the constant energization of the switch with an energization potential of the same polarity as the prepolarization potential, ensures reliable operation of the switch during use. I can continue. In addition, if desired for special equipment, a protective surface coating (15
F) is applied, which is not subjected to the acute deflection movements that occur in the clamped portion of the piezoelectric plate element. The result is great reliability, stability and long service life in operation and KW pressure resistance.

After manufacturing the piezoelectric ceramic switching device aat using the method described above and placing the device on the clamp part 0D, the switching device and clamp part assembly are attached to the XW protection tube 0D.
Insert it into υ. Next, slide this assembly into the cup-shaped tube Q2, and then place the tube a on top of this.
V-ru the outside of υ (1111) with a gaff frit V-ru if the base α2 is made of Gafnu, or with a suitable adhesive as shown previously. At this point, attach the electron tube aa Evacuate the interior of the hermetic tube if designed to operate as a vacuum device, in a manner known to those skilled in the art;
Alternatively, fill with an inert protective gas as described above. '
In order to ensure uniformity of the atmosphere inside i#+111, a through-flow path is provided in the clamp part Qη as shown by the dotted line at (17A) and (17B), and this passage is connected to the kufunpu part a71! Evenly distributed around the circumference.

FIG. 1 is a vertical cross-sectional view of one embodiment of the invention, in this case a plurality of piezoelectric ceramic switching devices (14-1) mounted in a single hermetically sealed ifaυ;
(14-2) and (14-3). In this embodiment of the invention, while the air tube section (1υ) seals the tube section G11 to the base α2 to form an airtight seam μ,
The piezoceramic nutting device is attached to the base part 0z in such a way that it is not exposed to any heat.
J connection, resistance welding.

Manufactured from one V yacht welded or cold welded conductive metal. The individual flexures (15(), (15-2) and (15-3) are round in shape, each with a single central conductive surface (15C) common to the piezoelectric ceramic plate elements of each of the six therapy devices. It is constructed in exactly the same way as the bending device shown in Figs.
) and (15-3) are connected to the insulating clamp cups (17-1), (17-2) and (1,7-3), respectively.
) are individually clamped to the upper surface of the base part U21, and the screw set (Fig. The base portion and the flexible portion (15
1. In this embodiment of the invention, the Kufunde parts (17-1), (17-2) and (
The portion of the piezoelectric ceramic plate element of each flexure located between 17-3) has no outer conductive surface and is not pre-polarized. As a result, the clamping portion of each piezoelectric ceramic plate element at the border is electrically neutral and mechanically free from strain. The potential difference between the reserve squad and actuation energization is determined by the respective upper reserve needle bar deflection piezoelectric plate elements (15A-1) and (15B-1).
: (15A-2), (15B-2> and (15
It is applied to the outer conductive surfaces (15D) and (15E) formed on the JA side of A-3) and (15B-3). This has one end connected to the lower end of the conductive surface outside 11 of the stirrer 6, through a hole in the metal plate 7 uz (such hole is sealed with a gaff frit or a suitable adhesive), and The underlying insulation extends through 'ff1 (12I), then (16A-1), (16B-1) S (16A-
2>, (16B-2) and (l15A-3), (16
This is done by means of a small conductor shown at B-3) and a jumper connection wire terminating at the sex pad. The conductive pads constitute surface-equipped device terminal pads with relatively flat surfaces.

Designed to mate with a companion conductive pad formed on a circuit board or other chassis portion, placed over it and then spot or resistance welded, conductive adhesive or other suitable conductive material They are bonded in water by bonding techniques.

For a more detailed explanation of surface-mounted devices and their fabrication, please refer to "Surface-mounted PC
-Refer to the article J that changes the stage of the board. Similarly, each piezoelectric ceramic switching device (14-1)
, contact supports (181 and a!IVi, conductive bases) for the fixed contacts of (14-2) and (14-3);
Similarly extending through the holes in the insulating surface (12I) under L (1z, and seven, the fixed contacts (28-1), (29-1)i (28-2) of the piezoelectric ceramic switching device
, (29-2), (28-3), and (29-3) each with N, 9! The surface device for providing a c-connection terminates at the limb clearing pad.

In addition to the above-mentioned structural characteristics, each bending portion (15-1),
(15-2) and (15-3> have a conductive surface of IA@, and the conductive surface is both polyimide siloxane and π
(Structural protective coating like hardware (12F-1)
, (15F-2) and (15F-3) cover the pre-polarized movable plate element portion of the flexure! A
With side conductive surfaces, this copolymer provides an excellent pinhole-free surface passivation protective coating for each piezoelectric ceramic invasive switching device. However, since the vacuum vJ device does not benefit from the additional protection afforded by a purchased protective coating, if the device constructed as shown in FIG. 7 is intended to operate in a vacuum environment, No protective grooved coating is applied, but if the device is to be filled with an inert gas, it is desirable to apply a structural protective coating to the six flange portions.

During fabrication of the multiple switching device embodiment shown in FIG.
-1), (14-2) and (14-3) are each mounted on the base σ3, with appropriate connecting conductive tracks, jumper connections and surface coating device terminal pads as described above in the lower insulating section. (121) to form the complete sub-assembly, the seventh part is then inserted into the conductive cover part aυ of the inverted pot rim. At this point, the surface around the top of the conductive base part Gz is welded, resistance welded, cold welded or Fixed by adhesive. Finished g
C. The interior of the sealed protective tube (ID) is then evacuated to a light degree ranging from 10 to 10 ) or filled with an inert gas atmosphere by methods known in the electron tube manufacturing art. The device is then brought to a temperature just below the Curie temperature of the piezoceramic plate element, and a high prepolarization potential difference is applied to the conductive surface on each side of the flexure, while the opposite positive or ground potential is applied to the Each switching device (14-1), (14-2) and (14
-3) Applied to the central conductive surface of During this pre-polarization process, the pre-polarization potential difference across each piezoelectric cefmic plate element is properly A-aligned separately so that the reef U5 formed thereby cooperates with it, as shown [I41
It is desirable to position each of the two constant contacts exactly in the center between each of the contact points L'I51 and Q. Thus, during the pre-C polarization, the respective grooves l'I51 are first arranged in the desired central position. By doing so, no further individual adjustments are required to properly align each lattice part after the fabrication of the entire assembly is completed. During alignment, optical or volumetric methods can be used to measure uniform air gaps, which is very difficult, if not impossible, using conventional positioning methods. A multiple piezoelectric ceramic switching device with three flexible switches as shown in FIG. 7 in a single common hermetic environment. , a separate piezoceramic flexure switching device can be used for each phase of a three I'0 circuit, making it ideal for use in regulating the current flowing through polyphase circuit installations such as three-phase AC V7 systems. Suitable.

FIG. 8 illustrates yet another implementation of the invention with a two-part gas-tight tube. The two-part tube of FIG. 8 consists of an upper inverted gafnuja section (11A) with an open lower end designed to fit into and seal with the lower sleeve section (IIEI); Place it on the metal base 02+ by welding or the like, and fix it to this using the same method.

Piezoelectric safety switching device (141 is an airtight tube (
ILA), (llf3), [IZ), m5+s+ and '4F of the present invention shown in FIG.
! Piezoelectric ceramic switch 1l used for bending
Constructed in a similar way to u4+. In the past, similar parts in each figure are marked with the same reference 1 (α symbol), and the marks used to point out differences in structure and installation are -f: No further explanation will be provided.

In the embodiment of Figure @8, the piezoelectric ceramic grating elements (15A) and (15I!
) and (15BUP), the upper part of the non-polarizable part of the plate element is placed in the central hole of the base part Gz and fixed to it with a suitable glass frit seam ~, adhesive or other similar sealant It is clamped at full of the insulating clamp part aη. Below the clamped part of the non-polarized part of the piezoelectric ceramic element are the non-polarized ceramics (15AUP) and (15AUP), respectively.
A suitable capacitor is formed in the part sandwiched between BUP > by the conductive surfaces ■ and Z in co-operation with the opposite parts of the central conductive surface (15C-1) or (15C-2). . On top of the capacitors thus produced, circuit components 341 and (g) are formed, respectively, which are connected in circuit relation with independent, hybrid or hemi-lithic integrated resistors, conductor fuses, etc. and/or with suitable printed conductor tracks. It can consist of passive circuit elements such as nine active semiconductor devices. The circuit thus established may be part of the energizing circuit for the pre-polarized flexure plate element (15A) or (15B);
M9 load current switch contact (24A), ■ or (24
It may form part of a circuit element connected to B), (2), or both. In this embodiment of the invention, the non-polarizable parts of the piezoelectric cefmic plate element (15AUP) and (15BUP) and the supplementary circuit elements formed on (15BUP) extend below the base part O3, and the tubes (11 people), (IIB) It should be noted that they are not enclosed in a protective atmosphere inside the base part a?J.

As in the form of FIG. 5, the FIG. 8 embodiment of the invention has a central conductive surface (15 cm 1 ) and
has two flexure plate elements (15A) and (1
5B) can be electrically isolated from each other using an insulating adhesive to hold them together into a monolithic structure, and many of the '47! This is the case with Shibai-sama. By fabricating the flexure plate element in this way, a single central i
The capacitor coupling that occurs between the capacitor element 33 and the can when only one surface is used can be reduced. In this method, a circuit consisting of capacitor elements (321 and
It is possible to provide optimal isolation from other circuit components so that two circuits made from such components can operate substantially independently of each other.

We are currently manufacturing an improved piezoelectric ceramic nutwitching device with an airtight #11 tube as shown in Figure 8.
First, a piezoelectric ceramic switching device (14) is fabricated by the method described in the co-filed U.S. patent application (GBD-2ozt), and then a base portion (14) is fabricated by the method described above.
21.

Again, the fixed contact support (181 and a9) passes through the hole in the base part α2 and is suitably sealed by a glass frit seal or a suitable adhesive as described at the beginning of this document. At this point in the manufacture, or prior to that,
The glass v (lIA) is sealed to the metal sleeve part (IIB) with a suitable glass frit seam indicated at +411. next.

The combined 'f (ILA) and (IIB) are the base part Q21
and the subassembly of the piezoelectric ceramic switching device α0, and the lower metal part (11B) is arranged so that the temperature inside the tube does not rise to a high temperature that would damage the piezoelectric ceramic switching device or exceed the Cucurie temperature. Welding is performed around the base part 1+2 by spot welding, resistance welding, cold welding, etc.

Next, the tubes (IIA), (IIB), and Q'1j (inside D are 10-10 to 10) are degassed to a high vacuum level of -H.
Hermetically sealed in a manner known to those skilled in the vacuum tube art.

After degassing, the water B/! has a temperature of 3e@ just below the Curie temperature of the piezoelectric ceramic flexure plate elements (15A) and (15B). -, conductive surface (15D), (1
Apply a pre-polarization potential to 5C-1) and (15B), (15C-2) to pre-polarize the flexure plate element in the manner described above. Here again, as in other embodiments of the invention during pre-polarization, centering the flexure uS in the curve of the fixed contacts (2) and (2) is due to the respective applied voltage in the manner described above. This is achieved by manipulating the prepolarization potential. In order to simplify the description and drawings, connection leads and terminals necessary for providing pre-polarization and excitation potential differences to the flexural grade elements and circuit components ω are not shown, but substantially the present invention is illustrated. This corresponds to an element as shown in embodiment # of FIG.

FIG. 9 shows (2) another embodiment of the present invention, in which a plurality of independent piezoelectric cephmics (light type switching devices!) (14-1) (14-2) and (1
4-3) are two half pot-shaped parts (Ill, (1
1B) and (IIA'), CIIB'). However, in this embodiment of the i-number device of the invention, compared to the embodiment of FIG. 7, only a pair of fixed contacts are provided instead of and. Due to this 11 structural feature, the respective brags (15-1), (15-2) and (15-
3) It is possible to program the excitation voltage applied to. For example, in an actuation shade consisting of a flexure (15
-1) has seven movable contacts (24-1) on the fixed contact Ω.
) is closed, and following 7, the flexible part (15-2)
is placed on the movable contact (24-1).
2) Close the circuit and then drive the flexible part (15-3) to open the possible vJ contact (24-2) of the hidden part (15-2).
The open contact (24-3) can be closed on the top. When programmed in this way, the closed electrical branch is connected to the fixed contact 0 and its support q! Pass through J.
Through the movable contact 9 and the central conductive surface (15C-1) of the flexible part (15-1), the movable contact (24-2) and the conductive surface (15C-2), and then the movable contact (24-3).
And the central conductive surface (15C
-3). In other operating modes, all three flexures (15-1), (15-2) and (15-3')
Regarding circuits, each possible i1L! L contact (24-1
), (24-2) and (24-3) can be closed. Alternatively, the fixed contacts and their movable contacts, independently of each other, may be selectively energized to bare or triple-closed, each independently of the other, so that two different It is also possible to form a branch circuit closure or three branch circuit closures. That is, it can be seen that the multiple switch device structure constructed as shown in FIG. 9 provides considerable flexibility in switch operation.

The FIG. 9 embodiment of the invention further comprises two separate half-pot shaped portions (ILA), (lIB) and (11A).
'), (IIB') The embodiment differs from the embodiment shown in FIG. 7 in the nature of the airtight tube formed by. Each half consists of No.-m (11A) made from a suitable General Electric Company puchnic made from polyetermide material under the trade name ULTEM. The characteristics of this material are
Half bowl-shaped tubes (l IA ), (IIB
) and (IIA'), (IIB"), the conductive surface (11B) can be easily and cost-effectively coated before or after molding into a desired mold such as (IIA'), (IIB"). '), CIIB') is an insulating base part (1
2I) and through this conductive surface 41! Lead bet, 0
], (15C-1), (1,5O-2) and (15
C-3) is provided with an insulating recess, the lead of which is connected to a surface vjgt device pad made on the lower outer surface of the insulating base (12I). Respective piezoelectric flexures (15-1).

(15-2> and (15-3)) It is necessary to supply polarization and @electromotive potential difference to the outer four cursed surfaces of (A).

Additional leads and terminal pads are not shown for simplicity and to avoid unduly complicating the drawings. Such connections are similar to those shown and described with respect to FIG.

Each piezoelectric ceramic bending part (15-1) (15
-2) and (15-3) shall hold them together as a unitary structure and shall attach each flexure to the insulating surface by means of a screw set, adhesive or other similar bonding device. iLA') to re-secure the respective flexures (
15-1), (15-2) and (15-3) Kufunpu means (17-1) consisting of nine insulating rods fixed throughout by screw sets or adhesives or both.
, (17-2) and (17-3) are installed in the air tube consisting of two halves of the pot (ILA), (IIB), and (IIA'), (11B'). . After fixing the flexible part in this way to the lower half pot tube along the fixed contact rod support α & [11, the lower half pot assembly containing the flexible switching device is attached to the upper half pot tube. Together with (11A) and (IIB), the two are bonded around the area with a suitable adhesive to form a hermetic tube. This tube has a conductive surface (11B)
, CIIB'), undesirable electromagnetic interference (
It also prevents the emission of G, M, and I heat.

The entire tube with nine sealed and airtight tubes (l LA ), (NIB) and (IIA'), (IIB') is evacuated to high vacuum or filled with a protective inert gas. Therefore, the temperature in the tube is raised to a level Iv just below the Curie temperature of the piezoelectric ceramic plate element; Pre-polarize the element. In this case, as well as in other slotting embodiments, during pre-polarization, the pre-(4B
Adjust the value of the polarization potential to determine the mutual relationship and the gap between the movable contacts and fixed contacts (g) of the end flexible portions (24-1) and (24-3), and l2iJQ. 1)
, (15-2) and (15-3) are placed exactly in the center of the space.

The embodiment i of FIG. 9 of the present invention shows that H
It is of particular value in illustrating the advantages of type contact systems. In this case, the normally centered and unbiased flexure is exactly at its [neutral point W! or center in the off condition to provide one actuator door, then selectively move to the right or left to provide two more actuator doors.

) jfi contact system is provided in this embodiment of the invention to excite the piezoelectric crystal element in its pre-polarized direction without applying a reverse voltage to the piezoelectric plate element on the opposite side of the flexure. is still possible. That is, H
When the mold system is in the neutral off position and is energized naturally (in the pre-polarization direction phase), one side of the flexure is exposed to a long-term electric field of opposite polarity through the other piezoelectric ceramic plate element. provides two opposite deflections without the possibility of depolarization of the flexure over the course of operation. Additionally, degassing to a high vacuum of 10 to 10 mm or an inert gas such as nitrogen, or argon or sulfur hexafluoride (8F6) is recommended. High e
J'! 1! By equipping the tube in a gas-tight protective tube filled with gas at a constant temperature, significantly higher voltages can be used for both the pre-polarization and the subsequent energization operation, which allows for faster switching. Compressive force can be applied to the contact point during response and closure.

An additional feature of the H-shaped switching system, given by the switching structure shown in all the drawings in this order, is the ethical error - to provide simultaneous actuation of two loads due to temporal or contact welding, etc. This is in contrast to electromagnetic relay technology where it is very difficult to balance the mechanical restoring forces on the glue relay machiner. As shown and discussed with respect to FIG. 9, such a construction allows for additional switching circuits not achievable with conventional electromagnetically actuated switches and relays. In FIG. 9, various external loads can be selectively applied depending on the flexural excitation and the number within the individual applied membranes. tA of polyphase circuit! 11'IF
i, packaged in a single protective tube with its attached advantages.
This is an obvious application for multi-device switches, which can provide an independent fAirrl for the closing time of each phase, independent of the closing time required for other phases. Additionally, systems employing the present invention can include synchronizing the opening and closing of switches (as well as both on the ridges) to fin voltage or current zero points or supplemental commutation shades, and for use in high efficiency cycling applications. enables extremely high performance equipment.

Figure 10 shows the actual flower face of the present invention shown in Figure 9, which is several times larger than that of Figure 9, and is 9C.
t91 [a'f (IIA), (IIB) O x U (
IIA').

(IIB') The non-polarizable portion of the piezoelectric cefmic plate element (along with the circuit components mounted thereon) is encapsulated therein. In this modification of the invention, the insulating poufstick or glass support 6D of the lower half of the pot is 1! This includes a large number of tIs indicated by the dotted line f53 in order to keep the recapture 9IC (or degassing space) equal on both sides of the support part 61).
j The through hole is open. On the support 60 are respective sets of clamp parts (17-1), (17-2) and (17).
-3) The fighting part (15-1) and (15-
2) and (15-3) are fixed. The respective flexible parts (15-1), (1
Those parts of the piezoceramic plate element consisting of 5-2) and (15-3) and those parts extending below the support 61) are not polarized, by virtue of which they are electrically neutral. Yes, and not subject to mechanical strain. Above the non-polarized portions of these piezoelectric grates, respective circuit components such as capacitors, resistors and other passive and active circuit elements such as semiconductor devices are provided as described with respect to the embodiment of the invention in FIG. method clz%ω,
Nuclei are formed as shown in (b) and C6. In other respects,
The persimmon embodiment of the invention of FIG. 10 is similar to that of FIG. 9, is made in a similar manner, and operates in the same manner.

In FIG. 10, all necessary connection jacks, conductors, printed conductive tracks, or other connections to the groin plate elements, as made in other embodiments of the invention, are shown.
fili7M parts and surface mount device terminal pads are
Figures not shown for simplicity.

From the foregoing description, it can be seen that the present invention enables a novel piezoelectric cefmic power switching device encapsulated within a hermetically sealed protective tube;
It can be seen that improved conductivity is imparted to the device. This improved nine properties result in an increase in deflection force, and
Increase the contact force for rock-driven switching contacts, improve the displacement of the flexure, and increase the pre-polarization voltage to achieve optimal Iu:I spacing of the flexure contacts relative to the fixed contacts. Optimizing and rounding the device for a high dielectric constant of the vacuum or protective gas surrounding the device, it provides the ability to operate the switch contacts at high voltages. Because of these characteristics and the N-preservation atmosphere provided by the airtight protection tube,
A large number of fitting devices can be mounted in a single coplanar tube and the structural 9f of the pre-polarized portion of the piezoelectric ceramic plate base.
, the need for protective coatings or encapsulation is eliminated. Additionally, using a contact material such as Anatomy Panasium alloy with a low 11 point for stable arc generation,
d in the current switch ([flow cancellation]) during switching
It is possible to reduce i/di and provide high voltage gravity.

This is because the protective atmosphere in which the contacts are used gives high voltage gravity at contact opening and current erasure, and keeping the contacts in a non-oxidizing atmosphere such as vacuum protects low melting point contacts. This is possible by preventing changes in the contact resistance. Due to the above-mentioned high dielectric strength and other properties achieved in one chamber by operating in a vacuum or in a protective gas atmosphere, voltage withstands of at least 2000 ports/mil are obtained in such devices. Furthermore, the timing of repeating the charging of the damaged body, the closing of the contacts, the double charging of the flexible body, the opening of the contacts, and the reverse auxiliary operation of the rigid body are optimized as necessary.

Industrial Applicability The present invention is equipped in an airtight protective tube that can be evacuated to a high vacuum of the order of 10 to 10 Torr, or filled with renal oxygen, argon, or SF6 with an ambient atmosphere of any vital protective gas. A new and improved family of piezoelectric ceramic power switching devices is provided. The switching device thus constructed can be used in industrial, commercial and domestic applications at a wide range of power levels.

Having described a number of practical aspects of an improved piezoelectric cefmic power nutwitching device constructed in accordance with the present invention using a hermetic protection tube, other modifications of the present invention will occur to those skilled in the art in light of the above teachings. I believe it is obvious that it can be done.

Therefore, individual embodiments of the invention may be considered within the scope of the invention as defined by the appended claims.
It is clear that various changes are possible.

[Brief explanation of the drawing]

Fig. 1 is a side view of an improved piezoelectric ceramic switching groove in which a piezoelectric ceramic flexible switching device is enclosed in a deaerated 9C protection tube according to the present invention. FIG. 2 is a partial front view of the compressed ceramic electric switching device shown in FIG. 1, and FIG. 3 is an enlarged plan view of the piezoelectric safety switching device shown in FIG. 1 taken out from the airtight protection tube. FIG. 3A is a similar enlarged plan view of another embodiment, and FIG. 4 is a vertical cross-sectional view taken along plane 4--4 of FIG. FIG. 5 shows, as one preferred embodiment of the present invention, 'j
It is used to attach a flexible switching device inside the Cm protection tube, and close to the switching device.
#A Non-polarized portion t- of a piezoceramic plate element consisting of a dawn-type switching device for supporting circuit components
Fig. 6 is a vertical view of the device to be provided, and Fig. 6 shows in detail how the urami-type switching device is physically installed in a cantilevered manner within the airtight protection tube shown in Fig. 5. FIG. 6 is an enlarged partial cross-sectional view of the apparatus of FIG. 5 shown in FIG. FIG. 7 shows yet another embodiment of the present invention, which is equipped in an all-metal 9 IC sealed protection tube and has surface-mounted device terminals for ease of assembly. FIG. 8 is a longitudinal cross-sectional view of a device having a plurality of piezoelectric setmic switching devices installed in a protection tube, which shows yet another embodiment of the present invention, in which the 5Pl:vR protection tube is made of metal. The mounting of the sleeve consists of a glass tube fixed in a Nureep, which is fixed on a metal base, and a piezoelectric sefmic plate element is mounted on the outside of the hermetic protection tube with a non-contact tube for mounting and supporting the circuit components. ki, cross-section of one made to include the plate portion; 9(8) fi a single periphery made of 9c material overcoated with a conductive surface to provide electromagnetic radiation seeding; FIG. 9 is a longitudinal cross-sectional view of yet another implementation of the present invention using a tube, in which a plurality of switching devices are connected to gPC! ? A vertical cross-sectional view of a device installed inside a pipe. FIG. 10 shows yet another bag extension according to the present invention similar to that shown in FIG.
By using a piezoelectric ceramic plate element having a non-split portion on which a circuit component consisting of a switching circuit shared with a switching device is mounted, a single common iIT is used. It is a one-view diagram showing a device equipped with a plurality of switching devices in an airtight tube. (111...Glass tube a)...Base member ■... -Piezoelectric ceramic switch Equipment (19・
・・・Similar member (15A), (1513)... ・Gray torpedo (15C), (15I)), (15B)...
・Conductive surface uf3, (16A), (16B) ・---One terminal means 07) ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ . . .・ ... Insulating surface Q・υ・ ... 4 with a sex cap ■ ... Insulating cap ■ ... Copper woven belt Punishment ... Fastening means ■, ■... ...Second contact means

Claims (1)

[Claims] A method for initial polarization and alignment of a movable piezoelectric ceramic flexure member of a piezoelectric ceramic flexure type switching device housed within a hermetic protection tube, the method comprising: mounting all of the main elements of the piezoelectric ceramic switching device within the hermetic protection tube; , and substantially complete assembly as a sealed unitary structure, by applying a relatively high initial polarization potential to each of said plate elements while maintaining said plate elements near their Curie temperature. by achieving a matched dipole arrangement in the material and by simultaneously adjusting the relative magnitude of the initial polarization potential applied to each piezoelectric ceramic plate element of said flexible member, said flexible member is mounted thereon. A method characterized in that the movable switch contacts are brought into a precise position with respect to the fixed contacts of the load current switch in the switching device.