JPH02148408A - Thin film magnetic head and its manufacture thereof - Google Patents

Abstract

PURPOSE:To improve a high frequency characteristic and recording/reproducing speed by forming a second magnetic layer in a flat shape on the upper surfaces of a first rising part and a second rising part in one magnetic layer. CONSTITUTION:A lower magnetic layer M1 has a first rising part M1b and a second rising part M1c which rises from a base plate part M1a at the almost same height as the first rising part. An upper magnetic layer M2 faces to the upper surface of the first rising part M1b in the lower magnetic layer with interposing a gap layer G and forms a joint part in an interval with this lower magnetic layer M1 on the upper surface of the second rising part M1c in the other magnetic layer. Then, the second magnetic layer is formed in the almost flat shape. Namely, since a bent part does not exist in the upper magnetic layer M2, the motion of a magnetic wall is not interrupted. Thus, the high frequency characteristic of a magnetic head is improved and the recording/ reproducing speed is made high.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a thin film magnetic head used in high-density magnetic recording devices and the like, and a method for manufacturing the same.

(Prior Art) Small thin-film magnetic heads have been developed for high-density magnetic recording in computer hard disk drives and the like.

This thin film magnetic head is manufactured by applying photolithography technology, and its tip portion has a configuration as shown in the cross section of FIG. 4. That is, a flat lower magnetic layer ml, an upper magnetic layer m2 that faces the lower magnetic layer m1 with a gap layer g interposed at the tip of the head and forms a junction j with the lower magnetic layer m1 at the rear; A plurality of coil conductor layers C1 to C12 are provided between both magnetic layers, extending in the direction perpendicular to the plane of the paper with an electrical insulating layer i interposed between each magnetic layer and each other.

A current flowing through one of the coil conductor layers C1 to C12 in a direction perpendicular to the plane of the paper circulates to the other one of the coil conductor layers C1 to C12 via a rear coil conductor layer (not shown), thereby causing the magnetic layer at the junction j to flow through the rear coil conductor layer (not shown). A magnetomotive force is generated, and a leakage magnetic field for recording is generated between the two magnetic layers at the tip of the head facing each other with the gap layer g interposed therebetween.

(Problems to be Solved by the Invention) In the conventional thin-film magnetic head shown in FIG. 4, the upper magnetic layer m1 is formed in a curved manner, and this curved portion impedes the movement of the domain wall, resulting in high frequency characteristics. There is a problem called Step 4, in which the recording/reproducing speed decreases due to deterioration of the recording/reproducing speed.

(Means for Solving the Problems) A thin film magnetic head according to the present invention includes a substantially flat substrate portion,
A first protrusion protruding from the base plate at the tip of the head, and a second protrusion protruding from the base plate at approximately the same height as the first protrusion behind the first protrusion.
one magnetic layer having a raised portion, and a magnetic layer facing the upper surface of the first raised portion of the negative magnetic layer with a gap layer interposed therebetween, and having a second raised portion of this magnetic layer on the upper surface of the second raised portion of the one magnetic layer. Between the other magnetic layer, which has a substantially flat shape forming a junction with one magnetic layer, and the first and second raised portions of the one magnetic layer, between the one and the other magnetic layers and between each other. With an electrical insulating layer interposed between the first and second. It includes a plurality of coil conductor layers extending in a direction perpendicular to the direction in which the second raised portions are connected, and is configured to improve high frequency characteristics by making the second magnetic layer into a flat shape without curved portions. ing.

The above-described method for manufacturing a thin film magnetic head according to the present invention includes forming a substantially flat substrate portion, and then forming a first magnetic head of substantially the same height on this substrate portion at the tip end portion of the head and behind it. Second
forming one magnetic layer by forming a raised portion of the first magnetic layer; A plurality of coil conductor layers are formed on the substrate portion of one of the magnetic layers between the second raised portions with electrical insulating layers interposed between the substrate portion and each other, and then on the coil conductor layers. The surface is the above-mentioned No. 1. forming an electrically insulating layer having a thickness that is the same as that of the second raised portion; forming a gap layer on the upper surface of the electrically insulating layer and the first raised portion; forming the other magnetic layer having a substantially flat shape on the upper surface of the second raised portion.

Hereinafter, the operation of the present invention will be explained in detail together with examples.

(Example) FIG. 1 is a sectional view showing the configuration of the tip portion of a thin film magnetic head according to an example of the present invention, where Mla is a lower magnetic layer, M2 is an upper magnetic layer, G is a gap layer, and J is a lower magnetic layer. 1 is a junction between the upper and lower magnetic layers, C1 to C14 are coil conductor layers, and 2 is an electrical insulating layer.

The lower layer M1 includes a substantially flat substrate portion M1a,
The first portion protruding from the substrate portion Mla at the head tip portion
, and a second raised part M 1 c raised from the substrate part Mla at substantially the same height as this first raised part M1b behind this first raised part Mlb. . The upper magnetic layer M2 faces the upper surface of the first raised portion M1b of the lower magnetic layer with the gap layer G interposed therebetween, and also faces the lower magnetic layer on the upper surface of the second raised portion M1c of this one magnetic layer. It consists of a substantially flat magnetic layer that forms a junction with M1. Furthermore, the first . A plurality of coil conductor layers 01 to C14 are formed between the second raised portion Mlb and the MIC and extend in the direction perpendicular to the plane of the paper with electrical insulating layers I interposed between the upper and lower magnetic layers and between each other. ing.

A current flowing through one of the coil conductor layers 01 to C14 in a direction perpendicular to the plane of the paper circulates to the other one of the coil conductor layers 01 to C14 via a rear coil conductor layer (not shown), thereby creating a magnetomotive force at the joint J. A leakage magnetic field for recording is generated between the upper and lower magnetic layers M1 and M2 at the head tip portion facing each other with the gap layer G interposed therebetween.

Since there is no curved portion in the upper magnetic layer M2, the motion of the domain walls is not hindered, and high-speed recording/reproduction is performed.

The method of manufacturing the thin film magnetic disk of the above embodiment will be explained with reference to the cross-sectional views of FIGS. 2 and 3.

First, a substrate portion Mla of the lower magnetic layer made of NiFe is formed on a slider substrate (not shown) by sputtering or plating, and then the portion where the coil conductor layer is to be formed is covered with a mask M such as a resist ((
Figure 2 (A)).

Next, a first plate of the same height made of NiFe is attached by plating or the like to each of the points where the coil tip and the joint are to be formed. Second raised portions M1b, Mlc are formed (FIG. 2(B)).

Subsequently, after the mask M is removed, an electrical insulating layer 1 is formed by sputtering, and a coil conductor layer C1, made of a metal material such as copper, is formed by photolithography.
C2...C7 are formed (Fig. 2(C)).

Subsequently, the electrical insulating layer I2 and the coil conductor layer C8°C9・
...After C14 is formed, this coil conductor layer C9
~ C14, the upper surface of which is the lower magnetic layer M1. Electrical insulating layer■
3 is formed (FIG. 3(A)).

Next, the electric insulating layer ①3 and the first . second raised part Mlb,
A gap layer G is formed on Mlc, and a second raised portion Ml
Gap layer G in the right page area that is about to form a joint on c
is selectively removed by ion beam etching (FIG. 3(B)).

Finally, the upper magnetic layer M2 made of NiFe is formed by sputtering or plating, and the manufacturing of the thin film magnetic head having the tip portion having the structure shown in FIG. 1 is completed.

(Effects of the Invention) As described above in detail, the thin film magnetic head of the present invention has a lower magnetic layer having a raised portion of approximately the same height at the head tip portion and at the junction portion of both the upper and lower magnetic layers, and Since the configuration includes a coil conductor layer formed on the lower magnetic layer between the protrusions, a gap layer formed on this, and a substantially flat upper magnetic layer formed on this gap layer, the upper The curved portion of the magnetic layer can be removed.

As a result, the high frequency characteristics of the magnetic head are improved and the recording/reproducing speed is improved.

Further, since the method for manufacturing the thin film magnetic head according to the present invention is simple as described above, it has the effect of reducing manufacturing costs.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view showing the configuration of the tip of a thin-film magnetic head according to an embodiment of the present invention, FIGS. 2 and 3 are cross-sectional views for explaining a method of manufacturing the thin-film magnetic head, and FIG. 1 is a cross-sectional view showing the configuration of a tip portion of a conventional thin-film magnetic head. Ml...lower magnetic layer, M1a...first raised part, Mlb...second raised part, M2...upper magnetic layer,
G: gap layer, J: junction between upper and lower magnetic layers, 0
1 to C14...Coil conductor layer, 1.11, 12.13
...Electrical insulation layer.

Claims (2)

[Claims] (1) a substantially flat substrate portion, a first protruding portion protruding from the substrate portion at the tip end of the head, and a first protruding portion at approximately the same height as the first protruding portion at the rear of the first protruding portion; one magnetic layer having a second raised part protruding from the substrate part;
the other magnetic layer having a substantially flat shape forming a junction with the one magnetic layer on the upper surface of the raised portion of the magnetic layer; It is characterized by comprising a plurality of coil conductor layers extending in a direction perpendicular to the direction in which the first and second raised portions are connected, with electrical insulating layers interposed between the magnetic layers and between each other. Thin film magnetic head. (2) A step of forming one magnetic layer by forming a substantially flat substrate portion and forming first and second raised portions of approximately the same height on this substrate portion at the head tip portion and behind the head tip portion. and a plurality of coils on the substrate portion of the one magnetic layer between the first and second raised portions of the one magnetic layer, with electrical insulating layers interposed between the substrate portion and the substrate portion and between each other. A conductor layer is formed on the coil conductor layer, the surface of which is the first and second coil conductor layer.
forming an electrical insulating layer with a thickness that is the same as the height of the raised portion; forming a gap layer on the upper surface of the electrical insulating layer and the first raised portion; and forming a gap layer on the upper surface of the electrical insulating layer and the first raised portion; A method of manufacturing a thin film magnetic head, comprising the step of forming another magnetic layer having a substantially flat shape on the upper surface of the raised portion.