JPH0214796U - - Google Patents
Info
- Publication number
- JPH0214796U JPH0214796U JP9370988U JP9370988U JPH0214796U JP H0214796 U JPH0214796 U JP H0214796U JP 9370988 U JP9370988 U JP 9370988U JP 9370988 U JP9370988 U JP 9370988U JP H0214796 U JPH0214796 U JP H0214796U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- semiconductor manufacturing
- manufacturing equipment
- vertical
- element holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9370988U JPH0214796U (cs) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9370988U JPH0214796U (cs) | 1988-07-15 | 1988-07-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0214796U true JPH0214796U (cs) | 1990-01-30 |
Family
ID=31318179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9370988U Pending JPH0214796U (cs) | 1988-07-15 | 1988-07-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0214796U (cs) |
-
1988
- 1988-07-15 JP JP9370988U patent/JPH0214796U/ja active Pending