JPH0214795U - - Google Patents

Info

Publication number
JPH0214795U
JPH0214795U JP9283288U JP9283288U JPH0214795U JP H0214795 U JPH0214795 U JP H0214795U JP 9283288 U JP9283288 U JP 9283288U JP 9283288 U JP9283288 U JP 9283288U JP H0214795 U JPH0214795 U JP H0214795U
Authority
JP
Japan
Prior art keywords
terminal
notch
heater
support member
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9283288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521276Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9283288U priority Critical patent/JPH0521276Y2/ja
Publication of JPH0214795U publication Critical patent/JPH0214795U/ja
Application granted granted Critical
Publication of JPH0521276Y2 publication Critical patent/JPH0521276Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP9283288U 1988-07-13 1988-07-13 Expired - Lifetime JPH0521276Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9283288U JPH0521276Y2 (US20030199744A1-20031023-C00003.png) 1988-07-13 1988-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9283288U JPH0521276Y2 (US20030199744A1-20031023-C00003.png) 1988-07-13 1988-07-13

Publications (2)

Publication Number Publication Date
JPH0214795U true JPH0214795U (US20030199744A1-20031023-C00003.png) 1990-01-30
JPH0521276Y2 JPH0521276Y2 (US20030199744A1-20031023-C00003.png) 1993-05-31

Family

ID=31317280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9283288U Expired - Lifetime JPH0521276Y2 (US20030199744A1-20031023-C00003.png) 1988-07-13 1988-07-13

Country Status (1)

Country Link
JP (1) JPH0521276Y2 (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007288163A (ja) * 2006-03-24 2007-11-01 Nuflare Technology Inc 半導体製造装置及びヒータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007288163A (ja) * 2006-03-24 2007-11-01 Nuflare Technology Inc 半導体製造装置及びヒータ

Also Published As

Publication number Publication date
JPH0521276Y2 (US20030199744A1-20031023-C00003.png) 1993-05-31

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