JPH02146837U - - Google Patents

Info

Publication number
JPH02146837U
JPH02146837U JP5433889U JP5433889U JPH02146837U JP H02146837 U JPH02146837 U JP H02146837U JP 5433889 U JP5433889 U JP 5433889U JP 5433889 U JP5433889 U JP 5433889U JP H02146837 U JPH02146837 U JP H02146837U
Authority
JP
Japan
Prior art keywords
wafer
repositioning
rail
wafers
reversing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5433889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5433889U priority Critical patent/JPH02146837U/ja
Publication of JPH02146837U publication Critical patent/JPH02146837U/ja
Pending legal-status Critical Current

Links

JP5433889U 1989-05-10 1989-05-10 Pending JPH02146837U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5433889U JPH02146837U (US07923587-20110412-C00022.png) 1989-05-10 1989-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5433889U JPH02146837U (US07923587-20110412-C00022.png) 1989-05-10 1989-05-10

Publications (1)

Publication Number Publication Date
JPH02146837U true JPH02146837U (US07923587-20110412-C00022.png) 1990-12-13

Family

ID=31576314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5433889U Pending JPH02146837U (US07923587-20110412-C00022.png) 1989-05-10 1989-05-10

Country Status (1)

Country Link
JP (1) JPH02146837U (US07923587-20110412-C00022.png)

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