JPH02146830U - - Google Patents

Info

Publication number
JPH02146830U
JPH02146830U JP5463789U JP5463789U JPH02146830U JP H02146830 U JPH02146830 U JP H02146830U JP 5463789 U JP5463789 U JP 5463789U JP 5463789 U JP5463789 U JP 5463789U JP H02146830 U JPH02146830 U JP H02146830U
Authority
JP
Japan
Prior art keywords
sample
hole
light transmission
transmission means
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5463789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5463789U priority Critical patent/JPH02146830U/ja
Publication of JPH02146830U publication Critical patent/JPH02146830U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5463789U 1989-05-11 1989-05-11 Pending JPH02146830U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5463789U JPH02146830U (it) 1989-05-11 1989-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5463789U JPH02146830U (it) 1989-05-11 1989-05-11

Publications (1)

Publication Number Publication Date
JPH02146830U true JPH02146830U (it) 1990-12-13

Family

ID=31576875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5463789U Pending JPH02146830U (it) 1989-05-11 1989-05-11

Country Status (1)

Country Link
JP (1) JPH02146830U (it)

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