JPH02146830U - - Google Patents
Info
- Publication number
- JPH02146830U JPH02146830U JP1989054637U JP5463789U JPH02146830U JP H02146830 U JPH02146830 U JP H02146830U JP 1989054637 U JP1989054637 U JP 1989054637U JP 5463789 U JP5463789 U JP 5463789U JP H02146830 U JPH02146830 U JP H02146830U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- hole
- light transmission
- transmission means
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989054637U JPH02146830U (enExample) | 1989-05-11 | 1989-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989054637U JPH02146830U (enExample) | 1989-05-11 | 1989-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146830U true JPH02146830U (enExample) | 1990-12-13 |
Family
ID=31576875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989054637U Pending JPH02146830U (enExample) | 1989-05-11 | 1989-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146830U (enExample) |
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1989
- 1989-05-11 JP JP1989054637U patent/JPH02146830U/ja active Pending