JPH02146429U - - Google Patents

Info

Publication number
JPH02146429U
JPH02146429U JP5666089U JP5666089U JPH02146429U JP H02146429 U JPH02146429 U JP H02146429U JP 5666089 U JP5666089 U JP 5666089U JP 5666089 U JP5666089 U JP 5666089U JP H02146429 U JPH02146429 U JP H02146429U
Authority
JP
Japan
Prior art keywords
rotating shaft
solution
solution supply
spray nozzle
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5666089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5666089U priority Critical patent/JPH02146429U/ja
Publication of JPH02146429U publication Critical patent/JPH02146429U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP5666089U 1989-05-16 1989-05-16 Pending JPH02146429U (US20030220297A1-20031127-C00033.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5666089U JPH02146429U (US20030220297A1-20031127-C00033.png) 1989-05-16 1989-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5666089U JPH02146429U (US20030220297A1-20031127-C00033.png) 1989-05-16 1989-05-16

Publications (1)

Publication Number Publication Date
JPH02146429U true JPH02146429U (US20030220297A1-20031127-C00033.png) 1990-12-12

Family

ID=31580680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5666089U Pending JPH02146429U (US20030220297A1-20031127-C00033.png) 1989-05-16 1989-05-16

Country Status (1)

Country Link
JP (1) JPH02146429U (US20030220297A1-20031127-C00033.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002143750A (ja) * 2000-11-13 2002-05-21 Honda Lock Mfg Co Ltd 車両用ミラーのコーティング装置および方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100425A (ja) * 1981-12-11 1983-06-15 Hitachi Ltd ウエハ両面のレジスト膜均一塗布装置
JPS63240967A (ja) * 1988-03-03 1988-10-06 Toray Ind Inc スピンコート装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100425A (ja) * 1981-12-11 1983-06-15 Hitachi Ltd ウエハ両面のレジスト膜均一塗布装置
JPS63240967A (ja) * 1988-03-03 1988-10-06 Toray Ind Inc スピンコート装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002143750A (ja) * 2000-11-13 2002-05-21 Honda Lock Mfg Co Ltd 車両用ミラーのコーティング装置および方法

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