JPH02146427U - - Google Patents

Info

Publication number

JPH02146427U

JPH02146427U JP5660789U JP5660789U JPH02146427U JP H02146427 U JPH02146427 U JP H02146427U JP 5660789 U JP5660789 U JP 5660789U JP 5660789 U JP5660789 U JP 5660789U JP H02146427 U JPH02146427 U JP H02146427U

Authority

JP

Japan

Prior art keywords

conductor

electric field

field strength

anode electrode

utility

Prior art date

1989-05-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004020 conductor Substances 0.000 claims description 3
• 238000001312 dry etching Methods 0.000 claims description 2
• 230000005684 electric field Effects 0.000 claims description 2
• 238000005530 etching Methods 0.000 claims description 2
• 239000003990 capacitor Substances 0.000 description 1