JPH02146366U - - Google Patents

Info

Publication number
JPH02146366U
JPH02146366U JP5580989U JP5580989U JPH02146366U JP H02146366 U JPH02146366 U JP H02146366U JP 5580989 U JP5580989 U JP 5580989U JP 5580989 U JP5580989 U JP 5580989U JP H02146366 U JPH02146366 U JP H02146366U
Authority
JP
Japan
Prior art keywords
sample
cooling
secondary ion
ion mass
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5580989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5580989U priority Critical patent/JPH02146366U/ja
Publication of JPH02146366U publication Critical patent/JPH02146366U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP5580989U 1989-05-17 1989-05-17 Pending JPH02146366U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5580989U JPH02146366U (enrdf_load_stackoverflow) 1989-05-17 1989-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5580989U JPH02146366U (enrdf_load_stackoverflow) 1989-05-17 1989-05-17

Publications (1)

Publication Number Publication Date
JPH02146366U true JPH02146366U (enrdf_load_stackoverflow) 1990-12-12

Family

ID=31579090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5580989U Pending JPH02146366U (enrdf_load_stackoverflow) 1989-05-17 1989-05-17

Country Status (1)

Country Link
JP (1) JPH02146366U (enrdf_load_stackoverflow)

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