JPH02146154U - - Google Patents

Info

Publication number
JPH02146154U
JPH02146154U JP5655189U JP5655189U JPH02146154U JP H02146154 U JPH02146154 U JP H02146154U JP 5655189 U JP5655189 U JP 5655189U JP 5655189 U JP5655189 U JP 5655189U JP H02146154 U JPH02146154 U JP H02146154U
Authority
JP
Japan
Prior art keywords
vacuum
vacuum chamber
forming apparatus
film forming
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5655189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5655189U priority Critical patent/JPH02146154U/ja
Publication of JPH02146154U publication Critical patent/JPH02146154U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5655189U 1989-05-17 1989-05-17 Pending JPH02146154U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5655189U JPH02146154U (enrdf_load_stackoverflow) 1989-05-17 1989-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5655189U JPH02146154U (enrdf_load_stackoverflow) 1989-05-17 1989-05-17

Publications (1)

Publication Number Publication Date
JPH02146154U true JPH02146154U (enrdf_load_stackoverflow) 1990-12-12

Family

ID=31580480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5655189U Pending JPH02146154U (enrdf_load_stackoverflow) 1989-05-17 1989-05-17

Country Status (1)

Country Link
JP (1) JPH02146154U (enrdf_load_stackoverflow)

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