JPH02144719U - - Google Patents
Info
- Publication number
- JPH02144719U JPH02144719U JP5244589U JP5244589U JPH02144719U JP H02144719 U JPH02144719 U JP H02144719U JP 5244589 U JP5244589 U JP 5244589U JP 5244589 U JP5244589 U JP 5244589U JP H02144719 U JPH02144719 U JP H02144719U
- Authority
- JP
- Japan
- Prior art keywords
- gratings
- detection device
- displacement detection
- optical displacement
- transparent substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005286 illumination Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052445U JPH0648339Y2 (ja) | 1989-05-08 | 1989-05-08 | 光学式変位検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052445U JPH0648339Y2 (ja) | 1989-05-08 | 1989-05-08 | 光学式変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02144719U true JPH02144719U (de) | 1990-12-07 |
| JPH0648339Y2 JPH0648339Y2 (ja) | 1994-12-12 |
Family
ID=31572754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989052445U Expired - Lifetime JPH0648339Y2 (ja) | 1989-05-08 | 1989-05-08 | 光学式変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648339Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06194124A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5531882A (en) * | 1978-08-25 | 1980-03-06 | Commissariat Energie Atomique | Hydrophobic substrate and its manufacture |
-
1989
- 1989-05-08 JP JP1989052445U patent/JPH0648339Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5531882A (en) * | 1978-08-25 | 1980-03-06 | Commissariat Energie Atomique | Hydrophobic substrate and its manufacture |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06194124A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648339Y2 (ja) | 1994-12-12 |