JPH02144445U - - Google Patents

Info

Publication number

JPH02144445U

JPH02144445U JP5465989U JP5465989U JPH02144445U JP H02144445 U JPH02144445 U JP H02144445U JP 5465989 U JP5465989 U JP 5465989U JP 5465989 U JP5465989 U JP 5465989U JP H02144445 U JPH02144445 U JP H02144445U

Authority

JP

Japan

Prior art keywords

resistor

silicon oxide

electrode

oxide film

polyimide layer

Prior art date

1989-05-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
• 239000004642 Polyimide Substances 0.000 claims description 4
• 229920001721 polyimide Polymers 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 3
• 229910004298 SiO 2 Inorganic materials 0.000 claims 1
• 230000015572 biosynthetic process Effects 0.000 claims 1
• 230000001681 protective effect Effects 0.000 claims 1