JPH02144185U - - Google Patents

Info

Publication number

JPH02144185U

JPH02144185U JP5123089U JP5123089U JPH02144185U JP H02144185 U JPH02144185 U JP H02144185U JP 5123089 U JP5123089 U JP 5123089U JP 5123089 U JP5123089 U JP 5123089U JP H02144185 U JPH02144185 U JP H02144185U

Authority

JP

Japan

Prior art keywords

cleaning

objective lens

area

light

reproducing

Prior art date

1989-04-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 15
• 230000003287 optical effect Effects 0.000 claims description 7
• 238000011109 contamination Methods 0.000 claims description 2
• 230000002452 interceptive effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000012544 monitoring process Methods 0.000 description 1