JPH02142669U - - Google Patents

Info

Publication number
JPH02142669U
JPH02142669U JP4968189U JP4968189U JPH02142669U JP H02142669 U JPH02142669 U JP H02142669U JP 4968189 U JP4968189 U JP 4968189U JP 4968189 U JP4968189 U JP 4968189U JP H02142669 U JPH02142669 U JP H02142669U
Authority
JP
Japan
Prior art keywords
chamber
supply
defoaming device
recovery chamber
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4968189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4968189U priority Critical patent/JPH02142669U/ja
Publication of JPH02142669U publication Critical patent/JPH02142669U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
  • Coating Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP4968189U 1989-04-28 1989-04-28 Pending JPH02142669U (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4968189U JPH02142669U (me) 1989-04-28 1989-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4968189U JPH02142669U (me) 1989-04-28 1989-04-28

Publications (1)

Publication Number Publication Date
JPH02142669U true JPH02142669U (me) 1990-12-04

Family

ID=31567585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4968189U Pending JPH02142669U (me) 1989-04-28 1989-04-28

Country Status (1)

Country Link
JP (1) JPH02142669U (me)

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