JPH02142526U - - Google Patents

Info

Publication number
JPH02142526U
JPH02142526U JP5140289U JP5140289U JPH02142526U JP H02142526 U JPH02142526 U JP H02142526U JP 5140289 U JP5140289 U JP 5140289U JP 5140289 U JP5140289 U JP 5140289U JP H02142526 U JPH02142526 U JP H02142526U
Authority
JP
Japan
Prior art keywords
sample
insulator
contact
groove portion
introducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5140289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5140289U priority Critical patent/JPH02142526U/ja
Publication of JPH02142526U publication Critical patent/JPH02142526U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5140289U 1989-04-28 1989-04-28 Pending JPH02142526U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5140289U JPH02142526U (US06521211-20030218-C00004.png) 1989-04-28 1989-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5140289U JPH02142526U (US06521211-20030218-C00004.png) 1989-04-28 1989-04-28

Publications (1)

Publication Number Publication Date
JPH02142526U true JPH02142526U (US06521211-20030218-C00004.png) 1990-12-04

Family

ID=31570816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5140289U Pending JPH02142526U (US06521211-20030218-C00004.png) 1989-04-28 1989-04-28

Country Status (1)

Country Link
JP (1) JPH02142526U (US06521211-20030218-C00004.png)

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