JPH02142524U - - Google Patents
Info
- Publication number
- JPH02142524U JPH02142524U JP5100089U JP5100089U JPH02142524U JP H02142524 U JPH02142524 U JP H02142524U JP 5100089 U JP5100089 U JP 5100089U JP 5100089 U JP5100089 U JP 5100089U JP H02142524 U JPH02142524 U JP H02142524U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- tank
- raw materials
- backflow prevention
- stores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 13
- 230000002265 prevention Effects 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5100089U JPH02142524U (en:Method) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5100089U JPH02142524U (en:Method) | 1989-04-28 | 1989-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142524U true JPH02142524U (en:Method) | 1990-12-04 |
Family
ID=31570040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5100089U Pending JPH02142524U (en:Method) | 1989-04-28 | 1989-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142524U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112994A (ja) * | 2006-10-19 | 2008-05-15 | Air Products & Chemicals Inc | 入口プレナムを持つ固体源容器 |
-
1989
- 1989-04-28 JP JP5100089U patent/JPH02142524U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112994A (ja) * | 2006-10-19 | 2008-05-15 | Air Products & Chemicals Inc | 入口プレナムを持つ固体源容器 |