JPH02141950U - - Google Patents

Info

Publication number
JPH02141950U
JPH02141950U JP5141689U JP5141689U JPH02141950U JP H02141950 U JPH02141950 U JP H02141950U JP 5141689 U JP5141689 U JP 5141689U JP 5141689 U JP5141689 U JP 5141689U JP H02141950 U JPH02141950 U JP H02141950U
Authority
JP
Japan
Prior art keywords
carrier
chamber
vacuum
processing
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5141689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5141689U priority Critical patent/JPH02141950U/ja
Publication of JPH02141950U publication Critical patent/JPH02141950U/ja
Pending legal-status Critical Current

Links

JP5141689U 1989-04-28 1989-04-28 Pending JPH02141950U (US07655688-20100202-C00548.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5141689U JPH02141950U (US07655688-20100202-C00548.png) 1989-04-28 1989-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5141689U JPH02141950U (US07655688-20100202-C00548.png) 1989-04-28 1989-04-28

Publications (1)

Publication Number Publication Date
JPH02141950U true JPH02141950U (US07655688-20100202-C00548.png) 1990-11-30

Family

ID=31570840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5141689U Pending JPH02141950U (US07655688-20100202-C00548.png) 1989-04-28 1989-04-28

Country Status (1)

Country Link
JP (1) JPH02141950U (US07655688-20100202-C00548.png)

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