JPH02141589A - Etching promoting additive - Google Patents
Etching promoting additiveInfo
- Publication number
- JPH02141589A JPH02141589A JP29538288A JP29538288A JPH02141589A JP H02141589 A JPH02141589 A JP H02141589A JP 29538288 A JP29538288 A JP 29538288A JP 29538288 A JP29538288 A JP 29538288A JP H02141589 A JPH02141589 A JP H02141589A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etchant
- additive
- acetylene alcohol
- alkanesulfonic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 46
- 239000000654 additive Substances 0.000 title claims description 26
- 230000000996 additive effect Effects 0.000 title claims description 20
- 230000001737 promoting effect Effects 0.000 title claims description 5
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000002253 acid Substances 0.000 claims abstract description 9
- -1 acetylene alcohol Chemical compound 0.000 claims abstract description 8
- 150000003839 salts Chemical class 0.000 claims abstract description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 5
- 239000002202 Polyethylene glycol Substances 0.000 claims abstract description 4
- 229920001223 polyethylene glycol Polymers 0.000 claims abstract description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 claims description 12
- 229910021578 Iron(III) chloride Inorganic materials 0.000 claims description 7
- 239000007864 aqueous solution Substances 0.000 claims description 7
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 claims description 7
- 229960003280 cupric chloride Drugs 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 150000002903 organophosphorus compounds Chemical class 0.000 claims description 4
- 239000004615 ingredient Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 13
- 238000004090 dissolution Methods 0.000 abstract description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052742 iron Inorganic materials 0.000 abstract description 3
- 239000010935 stainless steel Substances 0.000 abstract description 3
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract description 2
- 239000010949 copper Substances 0.000 abstract description 2
- 229910052802 copper Inorganic materials 0.000 abstract description 2
- 239000007921 spray Substances 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract 4
- 229910045601 alloy Inorganic materials 0.000 abstract 3
- 229910021591 Copper(I) chloride Inorganic materials 0.000 abstract 2
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 abstract 2
- 229940045803 cuprous chloride Drugs 0.000 abstract 2
- 229960002089 ferrous chloride Drugs 0.000 abstract 2
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 abstract 2
- 229910017709 Ni Co Inorganic materials 0.000 abstract 1
- 229910003267 Ni-Co Inorganic materials 0.000 abstract 1
- 229910003262 Ni‐Co Inorganic materials 0.000 abstract 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 125000005677 ethinylene group Chemical group [*:2]C#C[*:1] 0.000 abstract 1
- 230000005764 inhibitory process Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- 238000011156 evaluation Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 238000005187 foaming Methods 0.000 description 5
- 238000005507 spraying Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
- 238000007605 air drying Methods 0.000 description 2
- 125000002947 alkylene group Chemical group 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- SUMDYPCJJOFFON-UHFFFAOYSA-N isethionic acid Chemical compound OCCS(O)(=O)=O SUMDYPCJJOFFON-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- HSXUNHYXJWDLDK-UHFFFAOYSA-N 2-hydroxypropane-1-sulfonic acid Chemical compound CC(O)CS(O)(=O)=O HSXUNHYXJWDLDK-UHFFFAOYSA-N 0.000 description 1
- WQPMYSHJKXVTME-UHFFFAOYSA-N 3-hydroxypropane-1-sulfonic acid Chemical compound OCCCS(O)(=O)=O WQPMYSHJKXVTME-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 1
- ACIAHEMYLLBZOI-ZZXKWVIFSA-N Unsaturated alcohol Chemical compound CC\C(CO)=C/C ACIAHEMYLLBZOI-ZZXKWVIFSA-N 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- QDHFHIQKOVNCNC-UHFFFAOYSA-N butane-1-sulfonic acid Chemical compound CCCCS(O)(=O)=O QDHFHIQKOVNCNC-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 1
- KDKYADYSIPSCCQ-UHFFFAOYSA-N ethyl acetylene Natural products CCC#C KDKYADYSIPSCCQ-UHFFFAOYSA-N 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- TVDSBUOJIPERQY-UHFFFAOYSA-N prop-2-yn-1-ol Chemical compound OCC#C TVDSBUOJIPERQY-UHFFFAOYSA-N 0.000 description 1
- KCXFHTAICRTXLI-UHFFFAOYSA-N propane-1-sulfonic acid Chemical compound CCCS(O)(=O)=O KCXFHTAICRTXLI-UHFFFAOYSA-N 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
Abstract
Description
本発明は、塩化第二鉄又は塩化第二銅水溶液すなわちエ
ッチャントに添加し、エツチング効果をる。In the present invention, it is added to an aqueous solution of ferric chloride or cupric chloride, that is, an etchant, to produce an etching effect.
エツチング技術は産業、電イ機器の急速な発展にともな
い広い需要対応とさらに高度な精密処理対応が要求され
ている。
エツチングは塩化第二鉄あるいは化第二銅水溶液すなわ
ちエッチャントによる鉄、ステンレス、鉄−ニッケル系
合金、鉄−ニッケルーコバルト系合金、銅系素材の化学
溶解にて成されるもので、エッチャント濃度Φ温度条件
とエツチングスピード及びその仕上り性は、布接な関係
となっている事は広く知られている。With the rapid development of industrial and electrical equipment, etching technology is required to meet a wide range of demands and to respond to even higher precision processing. Etching is performed by chemically dissolving iron, stainless steel, iron-nickel alloys, iron-nickel-cobalt alloys, and copper materials using a ferric chloride or cupric chloride aqueous solution (etchant), and the etchant concentration Φ It is widely known that temperature conditions, etching speed, and finish quality are closely related.
しかしながら、このような従来のエツチング処理にあっ
ては、装置、エッチャントの制約もあり、エツチング条
件とエツチングスピード及びその仕上り性のバランスの
採れた環境を得るには著しく困難であり、かつそのバラ
ンス管理には多大の労力を要する車が知られている。
すなわち通常エツチング現場においては、エツチングス
ピード(効率)を向上させるために、エッチャント濃度
を低下させ、仕上り性をギセイとし効率化を計る事や、
仕上り性を向上させるためにエッチャント濃度を上げエ
ツチング効率をギセイとし対処するケースが見られる。
本発明は、広範なエツチング条件において、エツチング
スピード(効率)と仕」ニリ性をバランス良く向上させ
る事を提供する事を目的とするものである。However, in such conventional etching processing, there are restrictions on equipment and etchant, and it is extremely difficult to obtain an environment with a good balance between etching conditions, etching speed, and finish quality, and it is difficult to manage the balance. It is known that cars require a lot of effort. In other words, in order to improve the etching speed (efficiency) at the usual etching site, the etchant concentration is lowered to improve the finish quality and improve efficiency.
In order to improve the finish, there are cases where the etchant concentration is increased to reduce etching efficiency. The object of the present invention is to provide a well-balanced improvement in etching speed (efficiency) and workability under a wide range of etching conditions.
この発明は、このような従来の課題に着目してなされた
ものである。すなわち、
■アルカンスルホン酸、ヒドロキシル基含有アルカンス
ルホン酸又はこれらの塩類
■アセチレンアルコール又はアセチレンアルコールアル
キレンオキシド付加物
<c>ポリエチレングリコール及び
[株]有機リン化合物を必須成分とすることを特徴とす
るエツチング促進添加剤である。
(手段を構成する要件)
本発明に使用するアルカンスルホン酸、ヒドロキシル基
含有アルカンスルホン酸又はこれらの塩類において、ア
ルカ/スルホン酸とはメタンスルホン酸、エタンスルホ
ン酸、プロパンスルホン酸、ブタンスルホン酸が挙げら
れ、ヒドロキシル基含有アルカンスルホン酸とは2−ヒ
ドロキシエタン−1−スルホン酸、2−ヒドロキシプロ
パン1−スルホン酸、1−ヒドロキシプロパン−2=ス
ルホン酸、3−ヒドロキシプロパン−1−スルホン酸等
で、その塩類とはアルカリ金属、アミン、アンモニウム
塩類であり、これらは単独又は併用混合物として当該添
加剤の一成分を成す。
アセチレンアルコールとは分子内にアセチレン結合を持
つ不飽和アルコールであり、プロパルギルアルコール、
ブチンジオール等が挙げられ、アセチレンアルコールア
ルキレンオキシド伺加物とは、これらのアセチレンアル
コールにエチレンオキシド、プロピレンオキシド、ブチ
レンオキシド等のアルキレンオキシドを単独又は併用イ
・1加重合せしめたものをいう。アセチレンアルコール
ある゛いは同アルキレンオキシド付加物は単独又は併用
して使用し、当該添加剤の一成分を成す。
ポリエチレングリコールとは分子量200〜20000
のものが市販されているが、当該用途においては分子量
200−1000、さらに好ましくは分子ji)200
〜600が有効に作用し、単独又は併用混合物として当
該添加剤の一成分を成す。
有機リン化合物とはヒドロキシエタンジホスホン酪、及
びニトリロトリメチレンホスホン酩に代表されるキレー
ト機能を有する有機リン化合物であり、単独又は併用し
て使用し、当該添加剤の一成分を成す。
また、上記4つが必須成分となる添加剤は、塩化第二鉄
又は塩化第二銅水溶液に0.05〜2゜5重量%添加し
て使用する。添加量が0.05重量%未満又は2.5重
量%超過となると、均質安定な液が得難くなり、かつ効
果の点でも実用性に欠けるようになる。The present invention has been made by paying attention to such conventional problems. That is, an etching characterized by having as essential components: (1) alkanesulfonic acid, a hydroxyl group-containing alkanesulfonic acid, or a salt thereof; (2) acetylene alcohol or an acetylene alcohol alkylene oxide adduct; (c) polyethylene glycol and an organic phosphorus compound. It is a promoting additive. (Requirements constituting the means) In the alkanesulfonic acids, hydroxyl group-containing alkanesulfonic acids, or salts thereof used in the present invention, the alkali/sulfonic acids include methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, and butanesulfonic acid. The hydroxyl group-containing alkanesulfonic acids include 2-hydroxyethane-1-sulfonic acid, 2-hydroxypropane-1-sulfonic acid, 1-hydroxypropane-2=sulfonic acid, 3-hydroxypropane-1-sulfonic acid, etc. The salts are alkali metal, amine, and ammonium salts, and these salts constitute one component of the additive, either alone or in combination. Acetylene alcohol is an unsaturated alcohol with an acetylene bond in the molecule, including propargyl alcohol,
Examples include butyne diol, and the acetylene alcohol alkylene oxide additive refers to a mixture of these acetylene alcohols with alkylene oxides such as ethylene oxide, propylene oxide, butylene oxide, alone or in combination. Acetylene alcohol or its alkylene oxide adduct, used alone or in combination, constitutes a component of the additive. What is polyethylene glycol? Molecular weight 200-20,000
Although some are commercially available, in this application, molecular weight is 200-1000, more preferably molecular weight is 200.
~600 is effective and constitutes one component of the additive, either alone or in combination. The organic phosphorus compound is an organic phosphorus compound having a chelating function, typified by hydroxyethane diphosphone and nitrilotrimethylene phosphone, and is used alone or in combination to form a component of the additive. Further, the additives having the above four essential components are used by adding 0.05 to 2.5% by weight to an aqueous solution of ferric chloride or cupric chloride. If the amount added is less than 0.05% by weight or more than 2.5% by weight, it will be difficult to obtain a homogeneous and stable liquid, and the effect will also be impractical.
本願添加剤は、以下実施例(使用例)の示すごとく、エ
ツチング処理に優れた効果を発揮する。
この効果の木態は不明であるが、恐らく4つの必須成分
が互いに何等かの相乗作用を営むものであろう。ともあ
れ4つの必須成分より構成される添加剤は優れたエツチ
ング促進添加剤である。The additive of the present invention exhibits excellent effects in etching treatment, as shown in the following examples (examples of use). The nature of this effect is unknown, but it is likely that the four essential components have some kind of synergistic effect with each other. In any case, the additive composed of four essential components is an excellent etching promoting additive.
以下、実施例及び比較例により発明実施の態様及び効果
につき例示するが、勿論これらは説明用のものであって
、発明思想の範囲を画するものではない。
1〜3 び l 〜 6下表−1の
処方に従って、発明添加剤及び比較添加剤を製造した。
(以下余白)
1〜3 び l 〜6前記製造例及
び比較製造例の添加剤を用い、以下のような各試験を行
い評価を行った。その結果を表−2に示す。
■、溶解安定性評価
塩化第二鉄エッチャント(32°Be)にエツチング促
進添加剤を各々0.25%添加し、40℃での溶解安定
性を以下基準で評価した。
(基準)o:安定溶解 Δニ一部分散 ×:分離2、起
泡性評価
塩化第二銅エッチャント(33°Be)にエツチング促
進添加剤を各々0.5%添加し、100m1ネスラー管
に50m1採取する。45℃保持後、100回/30秒
はげしく振トウ20秒後の発泡m文を以下基準で評価し
た。
(基準) O: 5 m 1未満 Δ:5m1〜20m
文×:分離
3、エツチング効果(1)(光沢性)
ステンレス鋼(SUS304・含有炭素0.05%)を
塩化第二鉄水溶液(42°Be)にエツチング促進添加
剤2.0%添加した45℃エッチャントで2.0Kg/
、j、10分間噴霧後、水洗、風乾し目視による光沢度
比較を以下基準で評価した。
(基準)0優 O良 Δ可 X否4、エツチング
効果(2)(表面粗度特性)鋼材に所定パターンを描き
、塩化第二銅水溶液(33°Be)にエツチング促進添
加剤0.5%添加した40℃エッチャントで1.0Kg
/cmi、40秒間噴霧後、水洗、風乾後以下の評価項
目を数字で評価した。数字が小さいほど良好な性能を示
す。
表面粗度評価(φ心モ均粗さをμmで比較)5、エツチ
ング効果(3)(エツチングスピード)
4270イ材に所定パターンを描き、塩化第二銅水溶液
(45°Be)にエツチング促進添加剤2.0%添加し
た45℃エッチャントで1.5Kg / ai、5分間
噴霧後、水洗、風乾後以下の評価項目を数字で評価した
。数字が大きいほど良好な性能を示す。
エツチング深度評価(深さを11.mで比較)6、エツ
チング効果(4)(エツチングファクター)
純鉄材に所定パターンを描き、塩化第二鉄水溶液(43
°Be)にエツチング促進添加剤1.0%添加した45
℃エッチャントで1..5Kg/d、5分間噴霧後、水
洗風乾後置下の算出式にてエツチングファクター評価を
行った。数字が大きいほど良好な性能を示す。
E f = 2 X d / (w −w t )(式
中dはエツチング深度、Wはエツチング巾、Wlはレジ
ストスリット巾を示す)
(以下余白)
表−2
本発明ニー2チング促進添加剤は評価、Nol〜N01
6のすべてに良好でなくてはならず、溶解安定性、起泡
性、エツチング効果において優れた特性を示している。
一方、比較添加剤4.5.6は溶解安定性、起泡性、及
び光沢において非実用的な性能を示し、同1.2.3は
1)■成分が構成されていない為、特に光沢性に劣る
2)■成分が構成されていない為、特に表面粗度特性に
劣る
3)■成分が構成されていない為、特にエツチングスピ
ードに劣る、という結果である。
以上の結果より、比較添加剤では目的とする効果が得ら
れないことが明確となった。Hereinafter, the embodiments and effects of the invention will be illustrated by Examples and Comparative Examples, but these are, of course, for illustrative purposes and do not limit the scope of the inventive idea. 1-3 and 1-6 Invention additives and comparative additives were manufactured according to the formulations shown in Table 1 below. (Hereinafter, blank spaces) 1 to 3 and 1 to 6 Using the additives of the above production examples and comparative production examples, the following tests were conducted and evaluated. The results are shown in Table-2. (2) Evaluation of dissolution stability 0.25% of each etching accelerating additive was added to ferric chloride etchant (32°Be), and dissolution stability at 40°C was evaluated according to the following criteria. (Criteria) o: Stable dissolution ∆ partial dispersion ×: Separation 2, foaming evaluation Add 0.5% of each etching accelerator additive to cupric chloride etchant (33°Be) and collect 50ml into a 100ml Nessler tube. do. After holding at 45°C, it was shaken vigorously 100 times/30 seconds, and the foaming pattern after 20 seconds was evaluated based on the following criteria. (Standard) O: Less than 5 m1 Δ: 5 m1 to 20 m
Sentence ×: Separation 3, Etching Effect (1) (Gloss) Stainless steel (SUS304, carbon content 0.05%) was added to a ferric chloride aqueous solution (42°Be) with 2.0% etching accelerator additive 45 ℃ etchant 2.0Kg/
, j. After spraying for 10 minutes, the coating was washed with water, air-dried, and visually compared with glossiness, which was evaluated based on the following criteria. (Criteria) 0 Excellent O Good Δ Acceptable 1.0Kg with added 40℃ etchant
/cmi, after spraying for 40 seconds, washing with water, and air drying, the following evaluation items were numerically evaluated. The smaller the number, the better the performance. Surface roughness evaluation (comparison of φ core uniformity in μm) 5. Etching effect (3) (etching speed) Draw a specified pattern on 4270 material and add to cupric chloride aqueous solution (45°Be) to promote etching. After spraying with a 45° C. etchant containing 2.0% agent at 1.5 kg/ai for 5 minutes, washing with water and air drying, the following evaluation items were numerically evaluated. The larger the number, the better the performance. Etching depth evaluation (compare depth at 11.m) 6. Etching effect (4) (etching factor) Draw a prescribed pattern on pure iron material, and draw a ferric chloride aqueous solution (4.
45 with 1.0% etching accelerating additive added to °Be)
℃ etchant 1. .. After spraying at 5 kg/d for 5 minutes, the etching factor was evaluated using the calculation formula: after being washed with water and air-dried, it was left to stand. The larger the number, the better the performance. E f = 2 X d / (w − w t ) (In the formula, d is the etching depth, W is the etching width, and Wl is the resist slit width.) (The following is a blank space) Table 2 The knee 2 etch promoting additive of the present invention is Evaluation, Nol~N01
It must be good in all of 6, showing excellent properties in dissolution stability, foaming property, and etching effect. On the other hand, Comparative Additive 4.5.6 shows impractical performance in dissolution stability, foaming property, and gloss, and Comparative Additive 1.2.3 is particularly glossy because it does not consist of component 1). The results are that the surface roughness characteristics are particularly poor because the 2) component (2) is not included, and the etching speed is particularly poor because the component (3) is not included. From the above results, it became clear that the comparative additives did not achieve the desired effect.
本発明のエツチング促進添加剤を使用することにより、
一般に実施されるスプレーエツチング方法において、溶
解安定性、操業上問題となる発泡の抑制、仕上り性、エ
ツチング効率に優れた特徴を有したエツチング処理にお
けるファイン化及びスピード向上に寄与するエツチング
促進添加剤を提供できる。By using the etching accelerating additive of the present invention,
In commonly used spray etching methods, we use etching accelerator additives that contribute to finer etching processes and faster etching processes, which have excellent dissolution stability, suppression of foaming that causes operational problems, finish quality, and etching efficiency. Can be provided.
Claims (1)
ルカンスルホン酸又はこれらの塩類 (b)アセチレンアルコール又はアセチレンアルコール
アルキレンオキシド付加物 (c)ポリエチレングリコール及び (d)有機リン化合物 を必須成分とする事を特徴とするエッチング促進添加剤
。 2、塩化第二鉄又は塩化第二銅水溶液に請求項1記載の
添加剤を0.05〜2.5重量%添加し使用する事を特
徴とするエッチング促進方法。[Scope of Claims] 1. (a) alkanesulfonic acid, hydroxyl group-containing alkanesulfonic acid, or salts thereof (b) acetylene alcohol or acetylene alcohol alkylene oxide adduct (c) polyethylene glycol and (d) organic phosphorus compound An etching accelerating additive characterized by being an essential ingredient. 2. A method for promoting etching, which comprises adding 0.05 to 2.5% by weight of the additive according to claim 1 to an aqueous solution of ferric chloride or cupric chloride.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29538288A JPH02141589A (en) | 1988-11-22 | 1988-11-22 | Etching promoting additive |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29538288A JPH02141589A (en) | 1988-11-22 | 1988-11-22 | Etching promoting additive |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02141589A true JPH02141589A (en) | 1990-05-30 |
JPH0427307B2 JPH0427307B2 (en) | 1992-05-11 |
Family
ID=17819907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29538288A Granted JPH02141589A (en) | 1988-11-22 | 1988-11-22 | Etching promoting additive |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02141589A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103060805A (en) * | 2011-08-22 | 2013-04-24 | 东友Fine-Chem股份有限公司 | Method for forming metal wire harness |
WO2016006373A1 (en) * | 2014-07-08 | 2016-01-14 | メック株式会社 | Etching agent and replenishing liquid |
-
1988
- 1988-11-22 JP JP29538288A patent/JPH02141589A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103060805A (en) * | 2011-08-22 | 2013-04-24 | 东友Fine-Chem股份有限公司 | Method for forming metal wire harness |
WO2016006373A1 (en) * | 2014-07-08 | 2016-01-14 | メック株式会社 | Etching agent and replenishing liquid |
Also Published As
Publication number | Publication date |
---|---|
JPH0427307B2 (en) | 1992-05-11 |
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