JPH02140980U - - Google Patents
Info
- Publication number
- JPH02140980U JPH02140980U JP4646589U JP4646589U JPH02140980U JP H02140980 U JPH02140980 U JP H02140980U JP 4646589 U JP4646589 U JP 4646589U JP 4646589 U JP4646589 U JP 4646589U JP H02140980 U JPH02140980 U JP H02140980U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- chamber wall
- radiation screen
- upper chamber
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4646589U JPH02140980U (de) | 1989-04-20 | 1989-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4646589U JPH02140980U (de) | 1989-04-20 | 1989-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140980U true JPH02140980U (de) | 1990-11-26 |
Family
ID=31561568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4646589U Pending JPH02140980U (de) | 1989-04-20 | 1989-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140980U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0570283A (ja) * | 1991-03-20 | 1993-03-23 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法及び装置 |
| JPH0728964U (ja) * | 1993-10-29 | 1995-05-30 | 住友シチックス株式会社 | 単結晶成長装置 |
-
1989
- 1989-04-20 JP JP4646589U patent/JPH02140980U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0570283A (ja) * | 1991-03-20 | 1993-03-23 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法及び装置 |
| JPH0728964U (ja) * | 1993-10-29 | 1995-05-30 | 住友シチックス株式会社 | 単結晶成長装置 |