JPH02140973U - - Google Patents
Info
- Publication number
- JPH02140973U JPH02140973U JP4705989U JP4705989U JPH02140973U JP H02140973 U JPH02140973 U JP H02140973U JP 4705989 U JP4705989 U JP 4705989U JP 4705989 U JP4705989 U JP 4705989U JP H02140973 U JPH02140973 U JP H02140973U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- plasma processing
- sample holder
- sample
- heat pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案に係るプラズマプロセス装置を
示す模式的縦断面図、第２図はロータリジヨイン
トを取り付けた従来のプラズマプロセス装置を示
す模式的縦断面図、第３図はスリツプリング及び
カートリツジヒータを取り付けた従来のプラズマ
プロセス装置を示す模式的縦断面図である。
７……試料保持具、９……ヒートパイプ。
Fig. 1 is a schematic longitudinal sectional view showing a plasma processing apparatus according to the present invention, Fig. 2 is a schematic longitudinal sectional view showing a conventional plasma processing apparatus equipped with a rotary joint, and Fig. 3 is a schematic longitudinal sectional view showing a plasma processing apparatus according to the present invention. 1 is a schematic vertical cross-sectional view showing a conventional plasma processing apparatus equipped with a trigger heater. 7... Sample holder, 9... Heat pipe.
Claims (1)
ロセス装置において、 前記試料保持具にヒートパイプが取り付けてあ
ることを特徴とするプラズマプロセス装置。[Claims for Utility Model Registration] A plasma processing apparatus having a sample holder for holding a sample, characterized in that a heat pipe is attached to the sample holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4705989U JPH02140973U (en) | 1989-04-21 | 1989-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4705989U JPH02140973U (en) | 1989-04-21 | 1989-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140973U true JPH02140973U (en) | 1990-11-26 |
Family
ID=31562662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4705989U Pending JPH02140973U (en) | 1989-04-21 | 1989-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140973U (en) |
-
1989
- 1989-04-21 JP JP4705989U patent/JPH02140973U/ja active Pending