JPH02140970U - - Google Patents
Info
- Publication number
- JPH02140970U JPH02140970U JP4631089U JP4631089U JPH02140970U JP H02140970 U JPH02140970 U JP H02140970U JP 4631089 U JP4631089 U JP 4631089U JP 4631089 U JP4631089 U JP 4631089U JP H02140970 U JPH02140970 U JP H02140970U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- tubular site
- site
- tubular
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims 3
- 230000007423 decrease Effects 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000000630 rising effect Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Radiation Pyrometers (AREA)
- Chemical Vapour Deposition (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Description
第１図は、本考案の一実施例の温度検出用管状
サイトの断面図。第２図は、本考案の異なる一実
施例の温度検出用管状サイトの断面図。第３図は
、本考案のさらに異なる一実施例の温度検出用管
状サイトの断面図。第４図は、本考案のさらに別
の一実施例の温度検出用管状サイトの断面図。第
５図は、本考案の他の一実施例の温度検出用管状
サイトの断面図、第６図は、従来の温度検出用管
状サイトの断面図。
１……反応炉壁、２……管状サイト、３，３Ａ
，３Ｂ……補助管、４……補助管の一端面、５…
…サイトガラス、６……補助管の他端面、７……
基体、８，８Ａ……Ｏリング、９……ガスの流入
口、１１……内管の一端部、１２……内管の他端
部、１３……内管、１４……凸部、２０……スト
ツパ、１００……先端部。
FIG. 1 is a sectional view of a temperature detection tubular site according to an embodiment of the present invention. FIG. 2 is a sectional view of a temperature detection tubular site according to a different embodiment of the present invention. FIG. 3 is a sectional view of a temperature detection tubular site according to yet another embodiment of the present invention. FIG. 4 is a sectional view of a temperature detection tubular site according to yet another embodiment of the present invention. FIG. 5 is a sectional view of a temperature detection tubular site according to another embodiment of the present invention, and FIG. 6 is a sectional view of a conventional temperature detection tubular site. 1...Reactor wall, 2...Tubular site, 3,3A
, 3B...Auxiliary pipe, 4...One end surface of the auxiliary pipe, 5...
...Sight glass, 6...Other end surface of auxiliary tube, 7...
Base, 8, 8A... O-ring, 9... Gas inlet, 11... One end of the inner tube, 12... Other end of the inner tube, 13... Inner tube, 14... Convex portion, 20 ... Stoppa, 100 ... Tip.
Claims (1)
部より温度検出を行なうための温度検出用管状サ
イトにおいて、管状サイト内径より小さい外径を
有し、その一端面がサイトガラス近傍に、他端面
が炉内の被温度検出体表面近傍に達し、管状サイ
ト内壁に、シール部材を介して挿填した補助管と
、前記サイトガラスとサイトガラスに最も近いシ
ール部材との間の前記管状サイト内壁の任意の位
置に設けた、管内置換用ガスの流入口とを備えた
ことを特徴とする温度検出用管状サイト。 ２ 反応炉壁より立ち上がつて設けられた、炉外
部より温度検出を行なうための温度検出用管サイ
トにおいて、管状サイト全長より短かく、管状サ
イト内径より小さい外径を有し、前記管状サイト
内壁面との間に気密を保つて一端部で固定されて
、他端部が、サイトガラス近傍に達するよう挿填
された内管と、該内管一端部とサイトガラス間の
、管状サイト内壁の任意の位置に設けた管内置換
用ガスの流入口と、さらに、前記管状サイト内壁
面にシール部材を介して挿填されて、前記管状サ
イトの前記内管より反応炉側の内壁面に設けた凸
部でその一端面が支えられ、他端面が被温度検出
体表面近傍に達した補助管とを備えたことを特徴
とする温度検出用管状サイト。 ３ 反応炉壁より立ち上がつて設けられた、炉外
部より温度検出を行なうための温度検出用管状サ
イトにおいて、管状サイト全長より短かく、管状
サイト内径より小さい外径を有し、該管状サイト
内壁面との間に気密を保つて一端部で固定されて
、他端部が、サイトガラス近傍に達するよう挿填
された内管と、該内管一端部とサイトガラス間の
、管状サイト内壁の任意の位置に設けた管内置換
用ガスの流入口と、さらに、前記管状サイト内壁
面に、シール部材を介して挿填されて、前記内管
の反応炉側の端面でその一端面が支えられ、他端
面が被温度検出体表面近傍に達した補助管とを備
えたことを特徴とする温度検出用管状サイト。 ４ 補助管の被温度検出体側の端面が、斜めもし
くは段違いに切断され先端部を有する形状であつ
て、被温度検出体表面近傍の気流上流側において
、前記端面の先端部が、該被温度検出体に最も近
くなるよう、前記補助管を、前記管状サイト内壁
に挿填したことを特徴とする請求項１乃至３のい
ずれか一項に記載の温度検出用管状サイト。 ５ 補助管の内径が被温度検出体側ほど縮径して
いることを特徴とする請求項１乃至４のいずれか
一項に記載の温度検出用管状サイト。[Scope of Claim for Utility Model Registration] 1. A temperature detection tubular site for detecting temperature from outside the reactor, which is provided upright from the reactor wall, and which has an outer diameter smaller than the inner diameter of the tubular site; An auxiliary tube whose end surface reaches near the sight glass and whose other end surface reaches near the surface of the temperature-detected object in the furnace, and which is inserted into the inner wall of the tubular site via a sealing member, the sight glass and the sealing member closest to the sight glass. A tubular site for temperature detection, comprising: an inlet for a gas for replacing the inside of the tube, the inlet being provided at an arbitrary position on the inner wall of the tubular site between the tube and the tubular site. 2. A temperature detection tube site provided rising from the reactor wall for detecting temperature from the outside of the reactor, which has an outer diameter shorter than the overall length of the tubular site and smaller than the inner diameter of the tubular site; an inner tube that is fixed at one end while maintaining airtightness with the inner wall surface and inserted so that the other end reaches near the sight glass; and a tubular site inner wall between the one end of the inner tube and the sight glass. an inlet for an in-tube displacement gas provided at an arbitrary position; 1. A tubular site for temperature detection, comprising: an auxiliary tube, one end surface of which is supported by a convex portion, and the other end surface of which reaches near the surface of an object to be temperature detected. 3. A temperature detection tubular site for temperature detection from the outside of the reactor, which is provided upright from the reactor wall, and has an outer diameter that is shorter than the overall length of the tubular site and smaller than the inner diameter of the tubular site; an inner tube that is fixed at one end while maintaining airtightness with the inner wall surface and inserted so that the other end reaches near the sight glass; and a tubular site inner wall between the one end of the inner tube and the sight glass. and an inlet for replacing gas in the tube provided at an arbitrary position, and further inserted into the inner wall surface of the tubular site via a sealing member, and one end surface of the inner tube is supported by the end surface on the reactor side of the inner tube. 1. A tubular site for temperature detection, comprising: an auxiliary tube whose other end surface reaches near the surface of a temperature-detected object. 4. The end face of the auxiliary pipe on the temperature sensing object side is cut diagonally or in different steps and has a tip, and the tip of the end face is cut off diagonally or in different steps, and on the upstream side of the airflow near the surface of the temperature sensing object, the end face of the auxiliary pipe The temperature detection tubular site according to any one of claims 1 to 3, wherein the auxiliary tube is inserted into the inner wall of the tubular site so as to be closest to the body. 5. The temperature detection tubular site according to any one of claims 1 to 4, wherein the inner diameter of the auxiliary pipe decreases toward the temperature-detected object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4631089U JPH086239Y2 (en) | 1989-04-21 | 1989-04-21 | Tubular site for temperature detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4631089U JPH086239Y2 (en) | 1989-04-21 | 1989-04-21 | Tubular site for temperature detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02140970U true JPH02140970U (en) | 1990-11-26 |
| JPH086239Y2 JPH086239Y2 (en) | 1996-02-21 |
Family
ID=31561282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4631089U Expired - Lifetime JPH086239Y2 (en) | 1989-04-21 | 1989-04-21 | Tubular site for temperature detection |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH086239Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1032195A (en) * | 1996-07-16 | 1998-02-03 | Oki Electric Ind Co Ltd | Lamp-heating furnace for oxynitride film manufacture use |
-
1989
- 1989-04-21 JP JP4631089U patent/JPH086239Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1032195A (en) * | 1996-07-16 | 1998-02-03 | Oki Electric Ind Co Ltd | Lamp-heating furnace for oxynitride film manufacture use |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH086239Y2 (en) | 1996-02-21 |
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