JPH02140968U - - Google Patents
Info
- Publication number
- JPH02140968U JPH02140968U JP4745989U JP4745989U JPH02140968U JP H02140968 U JPH02140968 U JP H02140968U JP 4745989 U JP4745989 U JP 4745989U JP 4745989 U JP4745989 U JP 4745989U JP H02140968 U JPH02140968 U JP H02140968U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- lid
- ion beam
- cluster ion
- crucible body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims 6
- 230000008020 evaporation Effects 0.000 claims 5
- 238000001704 evaporation Methods 0.000 claims 5
- 239000000126 substance Substances 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000005507 spraying Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4745989U JPH02140968U (tr) | 1989-04-21 | 1989-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4745989U JPH02140968U (tr) | 1989-04-21 | 1989-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140968U true JPH02140968U (tr) | 1990-11-26 |
Family
ID=31563404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4745989U Pending JPH02140968U (tr) | 1989-04-21 | 1989-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140968U (tr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012057235A (ja) * | 2010-09-13 | 2012-03-22 | Hitachi Zosen Corp | 真空蒸着装置 |
-
1989
- 1989-04-21 JP JP4745989U patent/JPH02140968U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012057235A (ja) * | 2010-09-13 | 2012-03-22 | Hitachi Zosen Corp | 真空蒸着装置 |