JPH02140838U - - Google Patents
Info
- Publication number
- JPH02140838U JPH02140838U JP4828289U JP4828289U JPH02140838U JP H02140838 U JPH02140838 U JP H02140838U JP 4828289 U JP4828289 U JP 4828289U JP 4828289 U JP4828289 U JP 4828289U JP H02140838 U JPH02140838 U JP H02140838U
- Authority
- JP
- Japan
- Prior art keywords
- view
- semiconductor substrate
- back surface
- sectional
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4828289U JPH02140838U (ru) | 1989-04-26 | 1989-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4828289U JPH02140838U (ru) | 1989-04-26 | 1989-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140838U true JPH02140838U (ru) | 1990-11-26 |
Family
ID=31564949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4828289U Pending JPH02140838U (ru) | 1989-04-26 | 1989-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140838U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001084606A1 (fr) * | 2000-04-27 | 2001-11-08 | Shin-Etsu Handotai Co., Ltd. | Plaquette de semi-conducteur et dispositif pour procede de fabrication d'un dispositif a semi-conducteurs |
-
1989
- 1989-04-26 JP JP4828289U patent/JPH02140838U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001084606A1 (fr) * | 2000-04-27 | 2001-11-08 | Shin-Etsu Handotai Co., Ltd. | Plaquette de semi-conducteur et dispositif pour procede de fabrication d'un dispositif a semi-conducteurs |
| US6787797B2 (en) | 2000-04-27 | 2004-09-07 | Shin-Etsu Handotai Co., Ltd. | Semiconductor wafer and device for semiconductor device manufacturing process |