JPH02140051U - - Google Patents
Info
- Publication number
- JPH02140051U JPH02140051U JP4884089U JP4884089U JPH02140051U JP H02140051 U JPH02140051 U JP H02140051U JP 4884089 U JP4884089 U JP 4884089U JP 4884089 U JP4884089 U JP 4884089U JP H02140051 U JPH02140051 U JP H02140051U
- Authority
- JP
- Japan
- Prior art keywords
- guide rail
- electrode pair
- tables
- pairs
- air bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002706 hydrostatic effect Effects 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 description 4
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
- Vibration Prevention Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4884089U JPH02140051U (no) | 1989-04-27 | 1989-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4884089U JPH02140051U (no) | 1989-04-27 | 1989-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140051U true JPH02140051U (no) | 1990-11-22 |
Family
ID=31566010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4884089U Pending JPH02140051U (no) | 1989-04-27 | 1989-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140051U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015133436A1 (ja) * | 2014-03-03 | 2015-09-11 | 日本精工株式会社 | テーブル装置、測定装置、工作機械、及び半導体製造装置 |
-
1989
- 1989-04-27 JP JP4884089U patent/JPH02140051U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015133436A1 (ja) * | 2014-03-03 | 2015-09-11 | 日本精工株式会社 | テーブル装置、測定装置、工作機械、及び半導体製造装置 |
| JP2015166114A (ja) * | 2014-03-03 | 2015-09-24 | 日本精工株式会社 | テーブル装置、測定装置、及び工作機械 |