JPH02139060U - - Google Patents

Info

Publication number
JPH02139060U
JPH02139060U JP4611889U JP4611889U JPH02139060U JP H02139060 U JPH02139060 U JP H02139060U JP 4611889 U JP4611889 U JP 4611889U JP 4611889 U JP4611889 U JP 4611889U JP H02139060 U JPH02139060 U JP H02139060U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
polishing
disk
screw
polishes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4611889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4611889U priority Critical patent/JPH02139060U/ja
Publication of JPH02139060U publication Critical patent/JPH02139060U/ja
Pending legal-status Critical Current

Links

JP4611889U 1989-04-19 1989-04-19 Pending JPH02139060U (US07714131-20100511-C00024.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4611889U JPH02139060U (US07714131-20100511-C00024.png) 1989-04-19 1989-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4611889U JPH02139060U (US07714131-20100511-C00024.png) 1989-04-19 1989-04-19

Publications (1)

Publication Number Publication Date
JPH02139060U true JPH02139060U (US07714131-20100511-C00024.png) 1990-11-20

Family

ID=31560913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4611889U Pending JPH02139060U (US07714131-20100511-C00024.png) 1989-04-19 1989-04-19

Country Status (1)

Country Link
JP (1) JPH02139060U (US07714131-20100511-C00024.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014155981A (ja) * 2013-02-15 2014-08-28 Takada Corp 研磨治具及び研磨治具に試料をセットする試料取付け治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014155981A (ja) * 2013-02-15 2014-08-28 Takada Corp 研磨治具及び研磨治具に試料をセットする試料取付け治具

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