JPH02138843U - - Google Patents

Info

Publication number
JPH02138843U
JPH02138843U JP4813089U JP4813089U JPH02138843U JP H02138843 U JPH02138843 U JP H02138843U JP 4813089 U JP4813089 U JP 4813089U JP 4813089 U JP4813089 U JP 4813089U JP H02138843 U JPH02138843 U JP H02138843U
Authority
JP
Japan
Prior art keywords
oven
introduction tube
heating source
source
introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4813089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4813089U priority Critical patent/JPH02138843U/ja
Publication of JPH02138843U publication Critical patent/JPH02138843U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP4813089U 1989-04-24 1989-04-24 Pending JPH02138843U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4813089U JPH02138843U (US06623731-20030923-C00012.png) 1989-04-24 1989-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4813089U JPH02138843U (US06623731-20030923-C00012.png) 1989-04-24 1989-04-24

Publications (1)

Publication Number Publication Date
JPH02138843U true JPH02138843U (US06623731-20030923-C00012.png) 1990-11-20

Family

ID=31564669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4813089U Pending JPH02138843U (US06623731-20030923-C00012.png) 1989-04-24 1989-04-24

Country Status (1)

Country Link
JP (1) JPH02138843U (US06623731-20030923-C00012.png)

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