JPH02138839U - - Google Patents
Info
- Publication number
- JPH02138839U JPH02138839U JP4813189U JP4813189U JPH02138839U JP H02138839 U JPH02138839 U JP H02138839U JP 4813189 U JP4813189 U JP 4813189U JP 4813189 U JP4813189 U JP 4813189U JP H02138839 U JPH02138839 U JP H02138839U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- magnets
- arc chamber
- insulator
- shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4813189U JPH0719081Y2 (ja) | 1989-04-24 | 1989-04-24 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4813189U JPH0719081Y2 (ja) | 1989-04-24 | 1989-04-24 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02138839U true JPH02138839U (de) | 1990-11-20 |
| JPH0719081Y2 JPH0719081Y2 (ja) | 1995-05-01 |
Family
ID=31564671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4813189U Expired - Lifetime JPH0719081Y2 (ja) | 1989-04-24 | 1989-04-24 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719081Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05182623A (ja) * | 1991-05-14 | 1993-07-23 | Applied Materials Inc | イオン源の寿命を向上させたイオン打ち込み装置及び方法 |
| JP2013069577A (ja) * | 2011-09-22 | 2013-04-18 | Nissin Ion Equipment Co Ltd | プラズマ閉じ込め容器およびこれを備えたイオン源 |
-
1989
- 1989-04-24 JP JP4813189U patent/JPH0719081Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05182623A (ja) * | 1991-05-14 | 1993-07-23 | Applied Materials Inc | イオン源の寿命を向上させたイオン打ち込み装置及び方法 |
| JP2013069577A (ja) * | 2011-09-22 | 2013-04-18 | Nissin Ion Equipment Co Ltd | プラズマ閉じ込め容器およびこれを備えたイオン源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719081Y2 (ja) | 1995-05-01 |