JPH02138434U - - Google Patents

Info

Publication number

JPH02138434U

JPH02138434U JP4807489U JP4807489U JPH02138434U JP H02138434 U JPH02138434 U JP H02138434U JP 4807489 U JP4807489 U JP 4807489U JP 4807489 U JP4807489 U JP 4807489U JP H02138434 U JPH02138434 U JP H02138434U

Authority

JP

Japan

Prior art keywords

pattern

reflectance pattern

alignment mark

directions

center point

Prior art date

1989-04-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002184 metal Substances 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (2)