JPH02138422U - - Google Patents
Info
- Publication number
- JPH02138422U JPH02138422U JP4787789U JP4787789U JPH02138422U JP H02138422 U JPH02138422 U JP H02138422U JP 4787789 U JP4787789 U JP 4787789U JP 4787789 U JP4787789 U JP 4787789U JP H02138422 U JPH02138422 U JP H02138422U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- reactor
- gas
- partition wall
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000010574 gas phase reaction Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4787789U JPH02138422U (en:Method) | 1989-04-24 | 1989-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4787789U JPH02138422U (en:Method) | 1989-04-24 | 1989-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138422U true JPH02138422U (en:Method) | 1990-11-19 |
Family
ID=31564196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4787789U Pending JPH02138422U (en:Method) | 1989-04-24 | 1989-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138422U (en:Method) |
-
1989
- 1989-04-24 JP JP4787789U patent/JPH02138422U/ja active Pending