JPH02137747U - - Google Patents
Info
- Publication number
- JPH02137747U JPH02137747U JP4612589U JP4612589U JPH02137747U JP H02137747 U JPH02137747 U JP H02137747U JP 4612589 U JP4612589 U JP 4612589U JP 4612589 U JP4612589 U JP 4612589U JP H02137747 U JPH02137747 U JP H02137747U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- emitter
- ion beam
- hole
- gas phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000000284 extract Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4612589U JPH0644008Y2 (ja) | 1989-04-19 | 1989-04-19 | ガスフェーズ型集束イオンビーム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4612589U JPH0644008Y2 (ja) | 1989-04-19 | 1989-04-19 | ガスフェーズ型集束イオンビーム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02137747U true JPH02137747U (fr) | 1990-11-16 |
| JPH0644008Y2 JPH0644008Y2 (ja) | 1994-11-14 |
Family
ID=31560927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4612589U Expired - Fee Related JPH0644008Y2 (ja) | 1989-04-19 | 1989-04-19 | ガスフェーズ型集束イオンビーム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644008Y2 (fr) |
-
1989
- 1989-04-19 JP JP4612589U patent/JPH0644008Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644008Y2 (ja) | 1994-11-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |