JPH0213732U - - Google Patents

Info

Publication number
JPH0213732U
JPH0213732U JP9070388U JP9070388U JPH0213732U JP H0213732 U JPH0213732 U JP H0213732U JP 9070388 U JP9070388 U JP 9070388U JP 9070388 U JP9070388 U JP 9070388U JP H0213732 U JPH0213732 U JP H0213732U
Authority
JP
Japan
Prior art keywords
wafer
stage
vacuum
evaluating
fixes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9070388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9070388U priority Critical patent/JPH0213732U/ja
Publication of JPH0213732U publication Critical patent/JPH0213732U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9070388U 1988-07-08 1988-07-08 Pending JPH0213732U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9070388U JPH0213732U (US07413550-20080819-C00001.png) 1988-07-08 1988-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9070388U JPH0213732U (US07413550-20080819-C00001.png) 1988-07-08 1988-07-08

Publications (1)

Publication Number Publication Date
JPH0213732U true JPH0213732U (US07413550-20080819-C00001.png) 1990-01-29

Family

ID=31315217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9070388U Pending JPH0213732U (US07413550-20080819-C00001.png) 1988-07-08 1988-07-08

Country Status (1)

Country Link
JP (1) JPH0213732U (US07413550-20080819-C00001.png)

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