JPH02137031U - - Google Patents

Info

Publication number

JPH02137031U

JPH02137031U JP4312589U JP4312589U JPH02137031U JP H02137031 U JPH02137031 U JP H02137031U JP 4312589 U JP4312589 U JP 4312589U JP 4312589 U JP4312589 U JP 4312589U JP H02137031 U JPH02137031 U JP H02137031U

Authority

JP

Japan

Prior art keywords

semiconductor manufacturing

chemical liquid

liquid bottle

piping

nozzle

Prior art date

1989-04-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011248 coating agent Substances 0.000 claims description 7
• 238000000576 coating method Methods 0.000 claims description 7
• 239000004065 semiconductor Substances 0.000 claims description 7
• 238000004519 manufacturing process Methods 0.000 claims description 6
• 239000000126 substance Substances 0.000 claims description 4
• 238000010438 heat treatment Methods 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000007788 liquid Substances 0.000 claims 3
• 238000010586 diagram Methods 0.000 description 2
• 238000005057 refrigeration Methods 0.000 description 1