JPH02136329U - - Google Patents
Info
- Publication number
- JPH02136329U JPH02136329U JP4663989U JP4663989U JPH02136329U JP H02136329 U JPH02136329 U JP H02136329U JP 4663989 U JP4663989 U JP 4663989U JP 4663989 U JP4663989 U JP 4663989U JP H02136329 U JPH02136329 U JP H02136329U
- Authority
- JP
- Japan
- Prior art keywords
- tape
- tape application
- application roller
- roller
- rollers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
Description
第１図は本考案の第１実施例の平面図、第２図
は第１図の正面図、第３図は本考案の第２実施例
の平面図、第４図は第３図の正面図、第５図は従
来のテープ貼付装置の平面図である。
１，１Ａ，１Ｂ……テープ貼付ローラ、２……
ガイドローラ、２Ａ，２Ｂ……円筒状ローラ、２
Ａ′，２Ｂ′……円錐状ローラ、３……テープ。
Fig. 1 is a plan view of the first embodiment of the present invention, Fig. 2 is a front view of Fig. 1, Fig. 3 is a plan view of the second embodiment of the invention, and Fig. 4 is a front view of Fig. 3. FIG. 5 is a plan view of a conventional tape applicator. 1, 1A, 1B... Tape pasting roller, 2...
Guide roller, 2A, 2B...Cylindrical roller, 2
A', 2B'... Conical roller, 3... Tape.
Claims (1)
プ貼付ローラと、このテープ貼付ローラに供給す
るテープを案内するガイドローラとを備え、前記
ガイドローラはテープの中央に対して左右に対称
配置した一対のローラで構成し、かつこれらロー
ラの回転軸を前記テープ貼付ローラの回転軸に対
して所要角度傾斜させたことを特徴とする半導体
ウエハのテープ貼付装置。 The tape application roller includes a tape application roller that applies the tape to the surface of the semiconductor wafer, and a guide roller that guides the tape supplied to the tape application roller, and the guide roller is a pair of rollers that are arranged symmetrically on the left and right with respect to the center of the tape. What is claimed is: 1. A semiconductor wafer tape application apparatus, characterized in that the rotational axes of these rollers are inclined at a predetermined angle with respect to the rotational axis of the tape application roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4663989U JPH02136329U (en) | 1989-04-20 | 1989-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4663989U JPH02136329U (en) | 1989-04-20 | 1989-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02136329U true JPH02136329U (en) | 1990-11-14 |
Family
ID=31561892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4663989U Pending JPH02136329U (en) | 1989-04-20 | 1989-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02136329U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010038698A (en) * | 2008-08-04 | 2010-02-18 | Hitachi High-Technologies Corp | Strip-like sheet inspecting device and strip-like sheet inspecting method |
-
1989
- 1989-04-20 JP JP4663989U patent/JPH02136329U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010038698A (en) * | 2008-08-04 | 2010-02-18 | Hitachi High-Technologies Corp | Strip-like sheet inspecting device and strip-like sheet inspecting method |