JPH02135139U - - Google Patents
Info
- Publication number
- JPH02135139U JPH02135139U JP4348089U JP4348089U JPH02135139U JP H02135139 U JPH02135139 U JP H02135139U JP 4348089 U JP4348089 U JP 4348089U JP 4348089 U JP4348089 U JP 4348089U JP H02135139 U JPH02135139 U JP H02135139U
- Authority
- JP
- Japan
- Prior art keywords
- suction surface
- electrostatic
- attracted
- thermal conductivity
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図はこの考案の一実施例の静電チヤツク装
置の基本的な構成を示す断面図、第２図はそのチ
ヤツク板１の平面図、第３図は従来技術の基本的
な構成を示す断面図である。
１……チヤツク板、１ａ……吸着面、２……ウ
エハ（処理物）、３……電極、５……直流電源、
１０……シート状体（弾性体層）。
Fig. 1 is a sectional view showing the basic structure of an electrostatic chuck device according to an embodiment of the invention, Fig. 2 is a plan view of the chuck plate 1, and Fig. 3 shows the basic structure of the prior art. FIG. 1...Chick board, 1a...Adsorption surface, 2...Wafer (processed object), 3...Electrode, 5...DC power supply,
10...Sheet-like body (elastic body layer).
Claims (1)
吸着させるようにした静電チヤツク装置において
、前記吸着面に熱伝導性が良好な弾性体層を形成
したことを特徴とする静電チヤツク装置。 What is claimed is: 1. An electrostatic chuck device in which a processed material is attracted to a suction surface of a chuck plate by electrostatic force, characterized in that an elastic layer having good thermal conductivity is formed on the suction surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4348089U JPH02135139U (en) | 1989-04-12 | 1989-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4348089U JPH02135139U (en) | 1989-04-12 | 1989-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02135139U true JPH02135139U (en) | 1990-11-09 |
Family
ID=31555922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4348089U Pending JPH02135139U (en) | 1989-04-12 | 1989-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02135139U (en) |
-
1989
- 1989-04-12 JP JP4348089U patent/JPH02135139U/ja active Pending