JPH02134434U - - Google Patents
Info
- Publication number
- JPH02134434U JPH02134434U JP4372889U JP4372889U JPH02134434U JP H02134434 U JPH02134434 U JP H02134434U JP 4372889 U JP4372889 U JP 4372889U JP 4372889 U JP4372889 U JP 4372889U JP H02134434 U JPH02134434 U JP H02134434U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- conditioning system
- blower
- air conditioning
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004378 air conditioning Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4372889U JPH02134434U (pl) | 1989-04-14 | 1989-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4372889U JPH02134434U (pl) | 1989-04-14 | 1989-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02134434U true JPH02134434U (pl) | 1990-11-08 |
Family
ID=31556386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4372889U Pending JPH02134434U (pl) | 1989-04-14 | 1989-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02134434U (pl) |
-
1989
- 1989-04-14 JP JP4372889U patent/JPH02134434U/ja active Pending