JPH02134371U - - Google Patents
Info
- Publication number
- JPH02134371U JPH02134371U JP4269389U JP4269389U JPH02134371U JP H02134371 U JPH02134371 U JP H02134371U JP 4269389 U JP4269389 U JP 4269389U JP 4269389 U JP4269389 U JP 4269389U JP H02134371 U JPH02134371 U JP H02134371U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas passing
- valve element
- passage
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269389U JPH02134371U (de) | 1989-04-11 | 1989-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269389U JPH02134371U (de) | 1989-04-11 | 1989-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02134371U true JPH02134371U (de) | 1990-11-07 |
Family
ID=31554458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4269389U Pending JPH02134371U (de) | 1989-04-11 | 1989-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02134371U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001108130A (ja) * | 1999-05-25 | 2001-04-20 | Applied Materials Inc | 半導体ウェーハ処理装置用クラスタバルブ |
| KR100941632B1 (ko) * | 2009-07-20 | 2010-02-11 | 주식회사 동산세라믹 | 일체형 미세 유량조절밸브 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125136B2 (de) * | 1971-09-20 | 1976-07-29 |
-
1989
- 1989-04-11 JP JP4269389U patent/JPH02134371U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125136B2 (de) * | 1971-09-20 | 1976-07-29 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001108130A (ja) * | 1999-05-25 | 2001-04-20 | Applied Materials Inc | 半導体ウェーハ処理装置用クラスタバルブ |
| KR100941632B1 (ko) * | 2009-07-20 | 2010-02-11 | 주식회사 동산세라믹 | 일체형 미세 유량조절밸브 |