JPH02133470U - - Google Patents
Info
- Publication number
- JPH02133470U JPH02133470U JP4076689U JP4076689U JPH02133470U JP H02133470 U JPH02133470 U JP H02133470U JP 4076689 U JP4076689 U JP 4076689U JP 4076689 U JP4076689 U JP 4076689U JP H02133470 U JPH02133470 U JP H02133470U
- Authority
- JP
- Japan
- Prior art keywords
- roll
- coating
- substrate
- coating roll
- doctor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000013013 elastic material Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は、この考案の１実施例を示すロールコ
ータの要部斜視図、第２−１図〜第２−３図は、
このロールコータにおける動作を説明するための
模式正面図、第３図は、このロールコータのドク
ターロールの溝の部分を拡大して示す断面図、第
４図及び第５図は、液晶用ポリシリコンＴＦＴ製
造プロセスを説明するための断面概要図、第６図
及び第８図はそれぞれ、従来のロールコータの概
略構成を示す断面図、第７図は、基板上の金属薄
膜のパターンにレジスト液が塗布されている状態
を示す一部拡大断面図、第９図及び第１０図はそ
れぞれ、従来のロールコータの溝付きロールの一
部とその溝の部分を拡大して示す図、第１１図は
、従来の溝付きロールによつて基板上の金属薄膜
パターンにレジスト液を塗布したときの状態を示
す拡大断面図、第１２図は、コーテイングロール
表面の塗布液の付着状況を説明するための断面図
である。
１０……コーテイングロール、１２……ドクタ
ーロール、１４……液溜部、１６……供給ノズル
、１８……基板搬送用プレート、２０……水平面
、２２……ガイドレール、２４……溝、２６……
吸着孔、Ｗ……被塗布基板。
FIG. 1 is a perspective view of the main parts of a roll coater showing one embodiment of this invention, and FIGS. 2-1 to 2-3 are
A schematic front view for explaining the operation of this roll coater, FIG. 3 is a sectional view showing an enlarged groove portion of the doctor roll of this roll coater, and FIGS. 4 and 5 are polysilicon for liquid crystal. Figures 6 and 8 are cross-sectional schematic diagrams for explaining the TFT manufacturing process, respectively, and Figure 7 is a cross-sectional diagram showing the schematic configuration of a conventional roll coater. FIGS. 9 and 10 are partially enlarged cross-sectional views showing the state in which the coating is being applied; FIGS. , an enlarged cross-sectional view showing the state when a resist liquid is applied to a metal thin film pattern on a substrate using a conventional grooved roll; FIG. 12 is a cross-sectional view for explaining the state of adhesion of the coating liquid on the coating roll surface It is a diagram. DESCRIPTION OF SYMBOLS 10... Coating roll, 12... Doctor roll, 14... Liquid reservoir, 16... Supply nozzle, 18... Board transfer plate, 20... Horizontal surface, 22... Guide rail, 24... Groove, 26 ……
Suction hole, W...Substrate to be coated.
Claims (1)
テイングロールと、そのコーテイングロールに対
し平行にかつ接離自在に配設されたドクターロー
ルとの当接部の上部側に形成される液溜部に塗布
液を供給し、その液溜部に供給された塗布液を、
搬送手段によつて搬送されてくる基板の表面に前
記コーテイングロールを介して塗布するロールコ
ータにおいて、基板を保持する水平面を有し、基
板の搬送路に沿つて水平方向に往復動自在に、か
つ前記コーテイングロールの直下位置を通過する
際にそのコーテイングロールに近接するように基
板搬送用プレートを配設し、前記コーテイングロ
ールの、少なくとも外周表面部を弾性素材により
形成し、かつその周面を平滑面とするとともに、
前記ドクターロールを金属素材により形成し、か
つその周面に円周方向の溝を所定ピツチで刻設し
たことを特徴とするロールコータ。 A liquid reservoir formed above the contact area between a coating roll disposed directly above the horizontal conveyance path of the substrate and a doctor roll disposed parallel to the coating roll so as to be able to move toward and away from the coating roll. The coating liquid is supplied to the tank, and the coating liquid supplied to the liquid reservoir is
A roll coater that coats the surface of a substrate conveyed by a conveyance means via the coating roll, which has a horizontal surface for holding the substrate, is capable of reciprocating horizontally along a substrate conveyance path, and A substrate conveying plate is disposed so as to be close to the coating roll when passing directly below the coating roll, and at least an outer peripheral surface of the coating roll is formed of an elastic material, and the peripheral surface is smooth. Along with the surface,
A roll coater characterized in that the doctor roll is formed of a metal material, and circumferential grooves are carved at a predetermined pitch on the circumferential surface of the doctor roll.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989040766U JPH0721246Y2 (en) | 1989-04-06 | 1989-04-06 | Roll coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989040766U JPH0721246Y2 (en) | 1989-04-06 | 1989-04-06 | Roll coater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02133470U true JPH02133470U (en) | 1990-11-06 |
| JPH0721246Y2 JPH0721246Y2 (en) | 1995-05-17 |
Family
ID=31550838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989040766U Expired - Lifetime JPH0721246Y2 (en) | 1989-04-06 | 1989-04-06 | Roll coater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721246Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04131458U (en) * | 1991-05-23 | 1992-12-03 | 大日本スクリーン製造株式会社 | roll coater |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5251360U (en) * | 1975-10-08 | 1977-04-13 | ||
| JPS52152944A (en) * | 1976-06-16 | 1977-12-19 | Nippon Steel Corp | Method for application of high-viscosity coating in thin layer |
-
1989
- 1989-04-06 JP JP1989040766U patent/JPH0721246Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5251360U (en) * | 1975-10-08 | 1977-04-13 | ||
| JPS52152944A (en) * | 1976-06-16 | 1977-12-19 | Nippon Steel Corp | Method for application of high-viscosity coating in thin layer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04131458U (en) * | 1991-05-23 | 1992-12-03 | 大日本スクリーン製造株式会社 | roll coater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0721246Y2 (en) | 1995-05-17 |
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